Longitudinal high-voltage semiconductor device
A semiconductor, high-voltage technology, applied in the direction of semiconductor devices, electrical components, circuits, etc., can solve the problem of surface electric field concentration, and achieve the effect of increasing the lateral withstand voltage length, reducing the surface electric field, and improving the reliability of the device
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[0024] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0025] refer to figure 1 with figure 2 ,Such as figure 1 with figure 2 As shown, a vertical high-voltage semiconductor device includes: N-type doped semiconductor substrate 1, N-type doped epitaxial layer 2, P-type doped well region 3, P-type doped body region 4, high-concentration N-type doped impurity region 5, polysilicon gate 6, second polysilicon field plate 62, third polysilicon field plate 63, fourth polysilicon field plate 64, drain metal electrode 10 and stop ring electrode 12; An N-type doped epitaxial layer 2 is arranged on the N-type doped semiconductor substrate 1, and a P-type d...
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