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MEMS component with composite getter layer and preparation method thereof

A technology of getters and components, applied in the direction of electrical components, coatings, electric solid devices, etc., can solve the problems of internal vacuum degree reliability attenuation, lack of space for getters, etc., and achieve the effect of simple structure and convenient operation

Inactive Publication Date: 2015-07-01
GENERAL RESEARCH INSTITUTE FOR NONFERROUS METALS BEIJNG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] In order to solve the problem of insufficient space for placing the getter inside the MEMS device and the reliability attenuation caused by the internal vacuum

Method used

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  • MEMS component with composite getter layer and preparation method thereof
  • MEMS component with composite getter layer and preparation method thereof
  • MEMS component with composite getter layer and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0030] The process of preparing MEMS components with composite getter layers is as follows figure 1 As shown, the specific operation is as follows:

[0031] A. Mix the three components of ferro-zirconium vanadium getter powder (55wt%), organic binder (40wt%) and niobium oxide (5wt%); the organic binder is ethyl cellulose, silane The mixed solution of the joint agent and terpineol, the weight ratio of the three is 5%: 10%: 85%.

[0032] B. Use a 200-mesh polyester screen to screen-print a composite getter layer with a thickness of 95 microns on the Kovar cover plate of the MEMS device;

[0033] C. Vacuum firing the MEMS device prepared in step B at 450° C. for 1 hour to prepare a MEMS component with a composite getter layer. MEMS component structure such as figure 2 As shown, the composite getter layer 4 is attached to the cover plate 5 of the MEMS device.

[0034] The fired cover plate with the composite getter layer was kept at a temperature of 300° C. for 1 hour to cond...

Embodiment 2

[0037] Adopt the technical process identical with embodiment 1, concrete operations are as follows:

[0038] A. Mix the three components of ferro-zirconium vanadium getter powder (40wt%), organic binder (50wt%) and cerium oxide (10wt%); the organic binder is ethyl cellulose, silane The mixed solution of the joint agent and terpineol, the weight ratio of the three is 10%: 15%: 75%.

[0039] B. use 300 purpose polyester screens to screen-print a composite getter layer with a thickness of 40 microns on the ceramic shell of the MEMS device;

[0040] C. Vacuum firing the MEMS device prepared in step B at 450° C. for 1.5 hours to prepare a MEMS component with a composite getter layer. MEMS component structure such as image 3 As shown, the composite getter layer 4 is attached to the ceramic package 6 of the MEMS device.

[0041] The fired cover plate with the composite getter layer was kept at a temperature of 300° C. for 1 hour to conduct the getter activation test. The result ...

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Abstract

The invention discloses an MEMS component with a composite getter layer and a preparation method thereof. The method comprises the following steps: mixing three components including non-evapotranspiration getter material powder, an organic bonding agent and rear earth oxide; carrying out silk-screening a cover plate material or a tubular shell material of the MEMS component with a composite getter layer with the thickness of 10-400 microns by utilizing a 40-300-mesh screen; and carrying out vacuum sintering at 350-400 DEG C so as to prepare the MEMS component with the composite getter layer. The component can be conveniently prepared on a plurality of internal components of the MEMS device simultaneously when the vacuum degree of a seal chamber is maintained, the structure is simple, the use reliability of the MEMS device can be improved, the service life of the MEMS device can be prolonged by absorbing vapor and residual gas in the internal chamber after vacuum packaging.

Description

technical field [0001] The present invention relates to a MEMS component having an internal structure requiring a vacuum cavity, and more particularly, to a MEMS component having a composite getter layer for long-term maintenance of a vacuum environment around the cavity internal structure. Background technique [0002] Microdevices fabricated by microelectromechanical systems (MEMS) technology are playing an important role in many fields. For example, microgyroscopes enable extremely important control systems in transportation and commercial applications. Other micro devices manufactured by MEMS technology, such as pressure sensors, micro accelerometers, infrared sensors and resonators are also widely used in many fields. [0003] The internal components of some MEMS devices need to be used in a vacuum environment, such as micro gyroscopes and infrared sensors. The key to ensuring the reliability and service life of this type of device is to maintain the vacuum degree of ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81C1/00B81B7/00
Inventor 朱君张心强李洋徐瑶华
Owner GENERAL RESEARCH INSTITUTE FOR NONFERROUS METALS BEIJNG
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