A high-voltage esd protection device with a small hysteresis window

Abstract

The invention discloses a high-voltage ESD protection device with a small hysteresis window. The high-voltage ESD protection device can be used for an ESD protection circuit of an on-chip high-voltage IC. The high-voltage ESD protection device mainly comprises a P type substrate, an N type buried layer, an N well, P wells, a plurality of P+ injection regions, a plurality of N+ injection regions, double polysilicon gates and a plurality of field oxide isolation regions. According to the protection device, two ESD current discharge paths consisting of LDMOSs and SCRs are formed under the action of high-voltage ESD pulses; parasitic PNP transistors and N-well resistors form a common branch of the current discharge paths, so that the electron emissivity of the device is reduced, and the maintaining voltage and ESD robustness are improved; in addition, a Zener diode is arranged in the device so as to reduce triggering voltage and realize high-voltage ESD protection with the small hysteresis window.

Description

technical field [0001] The invention belongs to the field of electrostatic protection of integrated circuits, and relates to a high-voltage ESD protection device, in particular to a high-voltage ESD protection device with a small hysteresis window, which can be used to improve the reliability of on-chip high-voltage IC ESD protection. Background technique [0002] With the rapid development of power integration technology, electronic products have become increasingly miniaturized and complex, and the demand for mobile hard disks, flash memory cards, USB interfaces and smart phone display touch screens has continued to increase, and the reliability of on-chip high-voltage IC products has become increasingly prominent. . For example, the flash memory card suddenly cannot read data, the USB interface cannot carry out data communication, and the reliability problems such as the sudden black screen of the display touch screen have attracted more and more attention. The high-volt...

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Problems solved by technology

However, on the one hand, because the ESD protection design is limited by the working characteristics of the protected circuit, and on the other hand, due to the increasing demand for electrostatic protection level of consumer electronics, it is difficult for the ESD protection design of the on-chip high-voltage IC to break through the bottleneck of the existing technology.

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