Electrode structure, manufacturing method thereof, display substrate and display device

A technology of electrode structure and manufacturing method, which is applied in the direction of circuits, electrical components, and electric solid devices, can solve problems such as poor mechanical strength and flexibility, large square resistance, and increased power consumption of flexible display devices, achieving low square resistance, The effect of satisfying the requirement of electrical conductivity

Inactive Publication Date: 2015-04-29
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to the poor mechanical strength and flexibility of transparent conductive oxide materials such as indium tin oxide (Indium Tin Oxides, ITO) and indium zinc oxide (Indium Zinc Oxides, IZO), transparent conductive oxides are not suitable for making flexible display devices electrodes in
Existing flexible display devices generally use carbon materials to make electrodes. Although carbon materials can meet the requirements for mechanical strength and flexibility of flexible display devices, the square resistance of electrodes made of carbon materials is relatively large, which will increase the cost of flexible display devices. power consumption

Method used

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  • Electrode structure, manufacturing method thereof, display substrate and display device
  • Electrode structure, manufacturing method thereof, display substrate and display device
  • Electrode structure, manufacturing method thereof, display substrate and display device

Examples

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example 1

[0062] Example 1: The fabrication method of the electrode structure provided by the embodiment of the present invention, such as figure 1 As shown, it specifically includes the following steps:

[0063] S101, forming a carbon nanotube film on the substrate;

[0064] S102, using a modified material to perform a doping process on the carbon nanotube film;

[0065] S103 , performing a patterning process on the carbon nanotube film treated by the doping process to form a pattern including the first electrode.

[0066] The above-mentioned method provided by Example 1 of the present invention can ensure that the first electrode formed after the patterning process has a lower square resistance value by doping modified materials in the carbon nanotube film layer film. Therefore, using the method provided by Example 1 of the present invention The first electrode fabricated by the above method can meet the conductivity requirement of the flexible display for the flexible electrode. ...

example 2

[0089] Example 2: The fabrication method of the electrode structure provided by the embodiment of the present invention, such as figure 2 As shown, it specifically includes the following steps:

[0090] S201, forming a carbon nanotube film on the base substrate;

[0091] S202, performing a patterning process on the carbon nanotube film layer to form a pattern including carbon nanotube electrodes;

[0092] S203. Perform a doping process on the pattern of the carbon nanotube electrode by using a modified material to form a pattern including the first electrode.

[0093] The above-mentioned method provided by Example 2 of the present invention can ensure that the formed first electrode has a lower square resistance value by doping modified materials in the pattern of the carbon nanotube electrode. Therefore, the above-mentioned method provided by Example 2 of the present invention is used to make The first electrode can meet the requirements of flexible display on the conducti...

example 3

[0101] Example 3: The fabrication method of the electrode structure provided by the embodiment of the present invention, such as image 3 As shown, it specifically includes the following steps:

[0102] S301, forming a carbon nanotube film on the substrate;

[0103] S302, using a modified material to perform a doping process on the carbon nanotube film;

[0104] S303, forming a protective layer film on the carbon nanotube film film treated by a doping process by using a high-conductivity material;

[0105] S304. Perform a patterning process on the protective layer film and the carbon nanotube film layer film treated by the doping process to form a pattern including the first electrode and the second electrode; wherein, the pattern of the second electrode and the pattern of the first electrode are one by one corresponding, and the pattern of the second electrode covers at least the upper surface of the pattern of the corresponding first electrode; that is, the second electrod...

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Abstract

The invention discloses an electrode structure, a manufacturing method thereof, a display substrate and a display device. The manufacturing method of the electrode structure includes: forming a carbon nano tube film on a substrate; using modified materials to perform a doping process on the carbon nano tube film, performing pattern composition on the doped carbon nano tube film to form a pattern including a first electrode, or performing pattern composition on the carbon nano tube film to form a pattern including a carbon nano tube electrode, using modified materials to perform a doping process on the carbon nano tube electrode so as to form a pattern including the first electrode. Due to the fact that the modified materials are doped into the carbon nano tube materials, the formed first electrode is low in resistance, and the conductivity, required by flexible display, of the flexible electrode can be satisfied.

Description

technical field [0001] The invention relates to the field of display technology, in particular to an electrode structure, a manufacturing method thereof, a display substrate and a display device. Background technique [0002] At present, flexible display technology is developing rapidly, and flexible display devices have become an important development direction in the display field due to their characteristics such as lightness, durability, and bendability. [0003] Electrodes in flexible display devices, such as pixel electrodes, need to have good mechanical strength and flexibility to meet the bendable characteristics of flexible display devices. Due to the poor mechanical strength and flexibility of transparent conductive oxide materials such as indium tin oxide (Indium Tin Oxides, ITO) and indium zinc oxide (Indium Zinc Oxides, IZO), transparent conductive oxides are not suitable for making flexible display devices electrodes in the. Existing flexible display devices ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/02H01L21/48H01L23/48
CPCH01L21/48H01L21/4814H01L21/71H01L23/48G02F1/13439G02F2202/36H10K85/221H10K59/805H01L21/288H01L21/32056H01L21/321H01L21/32134H01L21/3215
Inventor 杨久霞白峰
Owner BOE TECH GRP CO LTD
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