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Atmospheric plasma jet generation device with hollow substrate and electrodes

A plasma and base electrode technology, applied in the field of plasma, can solve the problems of low efficiency of surface modification and decontamination of metal materials, low bombardment speed and energy of metal or non-metal ions, etc., achieve high electron density, reduce requirements, The effect of simplifying the operation process

Active Publication Date: 2015-04-22
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0004] In order to solve the technical problems existing in the background technology, the present invention provides a kind of atmospheric pressure hollow substrate electrode plasma jet generating device, to solve the metal or non-metallic ion bombardment velocity and Low energy, surface modification of metal materials and low decontamination efficiency

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  • Atmospheric plasma jet generation device with hollow substrate and electrodes
  • Atmospheric plasma jet generation device with hollow substrate and electrodes
  • Atmospheric plasma jet generation device with hollow substrate and electrodes

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Embodiment Construction

[0022] see Figure 1-6 , the present invention proposes an atmospheric pressure hollow substrate electrode plasma jet generator, comprising a DC discharge unit 20 and a power supply 41 for providing the discharge voltage of the DC discharge unit 20; the DC discharge unit 20 includes an air guide tube and an electrode group; the electrode group includes A cylindrical high-voltage electrode 22 and a ground electrode 23; the air duct 21 is a hollow tube, and the upper and lower ends are respectively provided with an inlet port 31 and an air outlet port 32; the high-voltage electrode 22 is placed in the axial center of the air duct 21, The ground electrode 23 is also provided with a hollow metal base unit 10 for forming a narrow airflow channel; the hollow metal base unit 10 is a cylinder, and a through hole is arranged in the axial direction; the through hole of the hollow metal base unit 10 and the air duct 21 is coaxial; the grounding electrode 23 is L-shaped, and the right-ang...

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Abstract

The invention relates to an atmosphere plasma jet generation device with a hollow substrate and electrodes. The atmosphere plasma jet generation device comprises a DC discharge unit and a power supply used for supplying a discharge voltage to the DC discharge unit. The DC discharge unit comprises an air guide pipe and an electrode set. The electrode set comprises the cylindrical high-voltage electrode and the grounding electrode. The air guide pipe is a hollow pipe. The upper end and the lower end of the air guide pipe are provided with an air inlet port and an air outlet port respectively. The high-voltage electrode is arranged at the center of the air guide pipe in the axial direction. A hollow metal substrate unit used for forming a narrow airflow channel is further arranged at the grounding electrode. The hollow metal substrate unit is a cylinder and is provided with a through hole in the axial direction. The atmosphere plasma jet generation device with the hollow substrate and the electrodes is simple in operation process and low in running cost.

Description

technical field [0001] The invention belongs to the field of plasma technology, and relates to a plasma generating device, in particular to an atmospheric pressure hollow base electrode plasma jet generating device, which can be used for surface treatment of metal materials. Background technique [0002] In recent years, application-centered research on plasma technology has been active in a wide range of fields such as physics, chemistry, electronics, materials science, and metallurgy and chemical engineering. Because of its high density, low gas temperature, controllable composition, and the ability to produce various active species, low-temperature plasma can be used to change the surface properties of metal materials. For surface modification of metal materials, traditional low-temperature plasma generators require high-frequency power (radio frequency 13.56MHz or microwave 2.45GHz) to maintain the supply of discharge energy, and work in a low-pressure environment, requi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05H1/24
Inventor 汤洁李静姜炜曼王屹山赵卫段忆翔
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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