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Two-freedom-degree, large-travel and large-load micro-positioning platform

A technology of micro-positioning platform and large stroke, which is applied to parts and instruments of instruments, etc., can solve the problems of limited application of micro-positioning platform and limited carrying capacity, and achieve the effect of micro-feeding and precise positioning.

Inactive Publication Date: 2015-04-08
TIANJIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the working space of existing micro-positioning platforms is micron-level, while scanning probe microscopes and scanning electron beam lithography require millimeter-level workspaces; the carrying capacity of existing two-degree-of-freedom micro-positioning platforms is very limited, which limits the application of micro-positioning platforms

Method used

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  • Two-freedom-degree, large-travel and large-load micro-positioning platform
  • Two-freedom-degree, large-travel and large-load micro-positioning platform
  • Two-freedom-degree, large-travel and large-load micro-positioning platform

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Embodiment Construction

[0013] In order to further understand the invention content, characteristics and effects of the present invention, the following examples are given, and detailed descriptions are as follows in conjunction with the accompanying drawings:

[0014] see Figure 1 to Figure 5 , a two-degree-of-freedom large-stroke large-load micro-positioning platform, including an upper platform 5 and a lower platform 10, the lower platform 10 is provided with a base 14, and four corners of the base 14 are provided with support blocks 16 The upper platform 5 includes a centrally arranged moving platform 1 and four fixed blocks 11 at four corners, the moving platform 1 and the four fixed blocks 11 are connected by four flexible branch chains, each Each of the flexible branch chains includes a moving block 2 and three parallel flexible structures 3 arranged centrally between two adjacent fixed blocks 11, and the moving block 2 and the moving platform 1 pass through one of the parallel The flexible ...

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Abstract

The invention discloses a two-freedom-degree, large-travel and large-load micro-positioning platform which comprises an upper platform and a lower platform. The lower platform is provided with a base. The upper platform comprises a central movable platform. The movable platform is connected with the base through four flexible standing columns. The four flexible standing columns are distributed at four corners below the movable platform. Each flexible standing column is formed by serially connecting two flexible hook hinges. Each flexible hook hinge is formed by two coplanar circular flexible hinges in a penetration manner. Each of two adjacent movable blocks of four movable blocks is driven by a voice coil motor to move in a translation manner. The two-freedom-degree, large-travel and large-load micro-positioning platform has the advantages that the voice coil motors are used as drivers, and large-travel motion range and submicron-level resolution are provided; the movable platform and the base are connected through the flexible standing columns, and the radial rigidity of the positioning platform is quite large.

Description

technical field [0001] The invention belongs to the technical field of precision positioning, in particular a large-stroke and large-load micro-positioning platform based on a flexible hinge mechanism driven by a voice coil motor, which is suitable for precision positioning occasions such as micro-electromechanical system manufacturing, biomedicine, micro / nano operation, and laser scanning. . Background technique [0002] At present, piezoelectric ceramic-driven micro-positioning platforms are relatively mature, and are widely used in micro / nano processing and measurement devices. However, the working space of existing micro-positioning platforms is micron-level, while scanning probe microscopes and scanning electron beam lithography require millimeter-level workspaces; the carrying capacity of existing two-degree-of-freedom micro-positioning platforms is very limited, which limits the application of micro-positioning platforms . Aiming at the current problems that need to...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G12B5/00
Inventor 田延岭李政蔡坤海张大卫
Owner TIANJIN UNIV
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