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Particle classification measurement device, sample preparation device with uniform particle concentration distribution, and nanoparticle film formation device

A technology for measuring devices and particles, which is applied in the direction of measuring devices, particle size analysis, sampling devices, etc., can solve the problems of unavoidable membrane damage and inability to eliminate uneven distribution of particles, and achieves small damage, clear particle size range, and The effect of low kinetic energy

Inactive Publication Date: 2016-11-30
SHIMADZU SEISAKUSHO CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Conventional wet methods such as spin coating cannot eliminate the uneven distribution of particles, and dry methods such as evaporation and sputtering cannot avoid damage to the film

Method used

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  • Particle classification measurement device, sample preparation device with uniform particle concentration distribution, and nanoparticle film formation device
  • Particle classification measurement device, sample preparation device with uniform particle concentration distribution, and nanoparticle film formation device
  • Particle classification measurement device, sample preparation device with uniform particle concentration distribution, and nanoparticle film formation device

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Embodiment Construction

[0077] figure 1 It roughly shows an example of the particle classification measurement device of the present invention. The flow path 10 has openings at the inlet 12 and the outlet 14, and has a flat shape with a rectangular cross section in both the flow direction and the width direction of the flow path. The size and shape of the flow path are not particularly limited, for example, it is a flat rectangular parallelepiped with a length (height) of 4 mm, a width (width of flow path) of 250 mm, and a depth (length of flow path) of 450 mm.

[0078] On the outlet 14 side of the flow path 10, a fan 15 is arranged as an air blowing mechanism for sucking the sample. A motor 16 that rotates the fan 15 is driven by a drive circuit 17 . On the sample gas suction side of the fan 15, a manual butterfly valve is provided as a flow rate adjustment valve 18, and the flow rate of the sample gas can be changed by adjusting the flow rate control valve 18. The fan 15 sucks air evenly across ...

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Abstract

A charger is arranged on the inlet side of the parallel flow path capable of forming a laminar flow of the sample gas flowing inside, and the charger includes a discharge electrode to charge particles in the sample gas. On one of the pair of opposing surfaces of the flow path, downstream of the charger, one or more attraction-side electrodes are arranged at positions at different distances from the flow path inlet along the flow path direction. A classification electrode is disposed on the other of the pair of opposing surfaces of the flow path. The grading electrode and the attracting electrode are disposed opposite to each other, and an electric field is generated between the grading electrode and the attracting electrode to attract charged particles in the sample gas flowing through the channel to the attracting electrode.

Description

technical field [0001] The present invention relates to a particle measurement device suitable for monitoring the concentration of nanoparticles in automobile exhaust gas, building sanitation management, labor safety and sanitation, etc., and particularly relates to a particle classification measurement device for measuring particles according to particle size classification, and a tester for uniform particle concentration distribution. Sample production device, and nanoparticle film film forming device. Background technique [0002] As a counting device for the number of microparticles with a small particle size of several nanometers to tens of nanometers or more, it is known to use the microparticles as the nucleus to condense working fluid vapors such as water and butanol around them to increase the diameter of the microparticles. Light is irradiated, and the number of scattered light pulses at a specific scattering angle is detected to measure the CPC (condensing particl...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N15/02G01N1/02G01N27/60
Inventor 奥田浩史
Owner SHIMADZU SEISAKUSHO CO LTD
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