Coil supporting device and plasma processing equipment
A coil support and coil support technology, which is applied in the direction of discharge tubes, electrical components, circuits, etc., can solve the problems of inability to eliminate the installation error and processing error of the radio frequency coil 54, the low accuracy of the plasma processing device, and the inability to adjust the height of the radio frequency coil 54, etc. problems, to eliminate installation errors and processing errors, and improve accuracy
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[0029] In order for those skilled in the art to better understand the technical solution of the present invention, the coil supporting device and the plasma processing equipment provided by the present invention will be described in detail below in conjunction with the accompanying drawings.
[0030] First of all, it needs to be explained that in the following embodiments provided by the present invention, the meaning of "two layers of coils arranged at intervals along the vertical direction" is: a coil is wound into multiple turns in the vertical direction, and each turn of the coil is one layer coils; or, a plurality of coils are arranged at intervals along the vertical direction, and each coil is composed of one or more turns of planar coils wound along the horizontal direction.
[0031] figure 2 It is a schematic structural diagram of the coil supporting device provided by the first embodiment of the present invention. image 3 for figure 2 A partial enlarged view of t...
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