Planet-like coating jig capable of rotating and revoluting and use method of planet-like coating jig

Abstract

The invention relates to a planet-like coating jig for evaporation coating inside a large-size coating machine cavity, and in particular relates to a planet-like coating jig capable of rotating and revoluting and achieving a uniform product coating effect in the large-size coating machine cavity, and a use method of the planet-like coating jig. The planet-like coating jig capable of rotating and revoluting and is mounted at the upper part inside the coating machine cavity and mainly comprises a jig body, a revolution system and a rotation system, wherein the jig body comprises three jig discs; the jig discs are umbrella-shaped, connecting columns are arranged at the sharp ends of the middle of the umbrella-shaped jig discs. The principle of planet movement is adopted, according to the regulation of rotation and revolution of a planet, the jig discs are enabled to rotate independently and revolute as a whole inside the coating machine cavity, the purpose that a protecting membrane layer is uniformly deposited on the surface of a product when a film is coated is achieved, and moreover not only is a main body part of a coated product uniformly coated, but also an optimal coating effect can be achieved for edges and corners of the coated product, and the uniformity of overall coating is achieved.

Description

technical field [0001] The invention relates to a coating fixture for evaporative coating in the chamber of a large-scale coating machine, especially a planetary-like coating that can be rotated and rotated to achieve a uniform coating effect under the action of an evaporation source, which is applied in the cavity of a large-scale coating machine. Jigs and their methods of use. Background technique [0002] Vacuum coating equipment is commonly used in industry for evaporation coating to complete the work of depositing film on the surface of the substrate to form a protective film. Vacuum evaporation coating requires certain vacuum conditions and evaporation conditions. Evaporation coating technology developed earlier in physical vapor deposition technology and because of its The superior characteristics make it widely used persistently. The vacuum evaporation coating equipment and process are relatively simple. It can deposit very pure films and prepare films with specific ...

AI Technical Summary

Problems solved by technology

[0002] Vacuum coating equipment is commonly used in industry for evaporation coating to complete the work of depositing film on the surface of the substrate to form a protective film. Vacuum evaporation coating requires certain vacuum conditions and evaporation conditions. Evaporation coating technology developed earlier in physical vapor deposition technology and because of its The superior characteristics make it widely used persistently. The vacuum evaporation coating equipment and process are relatively simple. It can deposit very pure film layers and prepare films with specific structures and properties. In vacuum evaporation coating equipment One of the main components is the coating fixture; in order to improve the efficiency of the coating work, the vacuum coating equipment is generally a large machine cavity, so the coating fixture is also designed with a large fixture. At present, except for small coating fixtures or special shapes In addition to coating fixtures, commonly used large-scale coating fixtures are umbrella-shaped, which has a larger area than flat coating fixtures, and the amount of coating products distributed on the surface of the fixture increases accordingly. However, umbrella-shaped fixtures have With a certain inclination, the position of the coated product on the surface of the umbrella-shaped fixture is different, so the thickness of the coated film layer is also different, which affects the uniformity of the film layer, and also causes the edges and corners of the coated product to be inaccurate. The complete deposition of the film layer directly affects the coating effect; in order to solve the above problems, people transform the coating jig into an umbrella-shaped coating jig that can be rotated during the coating operation, and the coating jig takes its central axis as the central axis and rotates around the central axis , the coating effect of the improved coating jig is greatly improved during operation, and the angular edges of the product can also be coated with the upper film layer smoothly. However, due to the shape of the jig, there is still a problem of coating uniformity. or small impact

Images