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One-dimensional raster scanning measuring head

A technology of raster scanning and probe, which is applied in the direction of transmitting sensing components with optical devices, can solve the problems that it is difficult to meet the detection requirements of large changes, it is not suitable for fast dynamic measurement, and the measuring range of inductive probe is small, so as to achieve simple structure, high resistance Strong jamming ability, improved accuracy and reliability effects

Inactive Publication Date: 2014-12-24
XI AN JIAOTONG UNIV
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0002] At present, the commonly used probe is the inductive probe. The inductive probe is a device that uses the change of the self-inductance and mutual inductance of the coil to realize the measurement. The structure of this type of probe is simple and reliable, and the requirements for the working environment are not high, and the resolution is high. , but its disadvantage is that the response frequency is low, which is not suitable for fast dynamic measurement. The output signal is an analog signal, which is susceptible to interference, and the measuring range of the inductive probe is small, generally less than 0.1 cm, which is difficult to meet the detection requirements of large changes.

Method used

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Embodiment

[0031]A one-dimensional raster scanning probe, including a lower substrate, a stylus, a precision bearing, a stylus mounting wheel, a tensioning wheel, a flexible steel belt, a high-precision grating ruler, a grating ruler reading head, a tensioning spring, and a limit position Block, shaft, upper base plate. The precision bearing is installed on the rotating shaft, and the rotating shaft is installed between the upper base plate and the lower base plate. The stylus installation runner and the tensioning runner are respectively installed on the corresponding precision bearings. The stylus is installed on the stylus installation runner. The flexible steel belt It is installed between the stylus mounting wheel and the tensioning wheel through screws, the high-precision grating scale with a resolution of 0.05 μm is mounted on the flexible steel belt, the grating scale reading head is mounted on the lower base plate, and the tensioning spring is mounted on the measuring Between th...

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Abstract

The invention provides a one-dimensional raster scanning measuring head. The one-dimensional raster scanning measuring head comprises a lower substrate, a measuring pin installation turning wheel, a tensioning turning wheel, a measuring pin, a flexible steel belt, a tensioning spring, a raster ruler and a raster ruler reading head; the measuring pin drives the measuring pin installation turning wheel to appropriately rotate, the flexible steel belt and the raster ruler on the flexible steel belt are accordingly driven to move relative to the raster ruler reading head, the position variable quantity of the measuring pin is accordingly converted into the reading variable quantity of the raster ruler, and the detection aim of the measuring head is achieved. According to the one-dimensional raster scanning measuring head, continuous and sensitive motions of the measuring pin are achieved through the traction capacity and the deformation recovery capacity of the tensioning spring; the one-dimensional raster scanning measuring head competes detection depending on the mechanical transmission principle and the raster optical principle rather than the self-inductance and mutual-inductance detection principle, the detection sensitivity is high, the anti-interference capacity is high, the structure is simple, the one-dimensional raster scanning measuring head is easy to implement, and the position variable quantity of the measuring head in a large scope can be measured.

Description

technical field [0001] The invention belongs to the field of precision scanning measurement, and in particular relates to a one-dimensional raster scanning measuring head. Background technique [0002] At present, the commonly used probe is the inductive probe. The inductive probe is a device that uses the change of the self-inductance and mutual inductance of the coil to realize the measurement. The structure of this type of probe is simple and reliable, and the requirements for the working environment are not high, and the resolution is high. , but its disadvantage is that the response frequency is low, which is not suitable for fast dynamic measurement. The output signal is an analog signal, which is susceptible to interference, and the measuring range of the inductive probe is small, generally less than 0.1 cm, which is difficult to meet the detection requirements of large changes. Contents of the invention [0003] The object of the present invention is to provide a o...

Claims

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Application Information

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IPC IPC(8): G01D5/26
Inventor 丁建军王丰东刘阳鹏李兵蒋庄德
Owner XI AN JIAOTONG UNIV
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