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Plastic composition used for wafer/mask carrier and reticle SMIF Pod by using plastic composition

A technology of plastic composition and conveying box, applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve problems such as poor, inability to effectively reduce the release of harmful free ions and wear resistance, and reduce the number of cleanings , Reduce the chance of damaging the wafer or mask surface, and reduce the effect of process cost

Inactive Publication Date: 2014-12-24
GUDENG PRECISION IND CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] In order to solve the above technical problems, the present invention provides a plastic composition applied to a wafer / reticle carrier, which can solve the problem that the existing wafer / reticle carrier cannot effectively reduce the release of harmful free ions and wear resistance Inconvenience and distress caused by poor

Method used

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  • Plastic composition used for wafer/mask carrier and reticle SMIF Pod by using plastic composition
  • Plastic composition used for wafer/mask carrier and reticle SMIF Pod by using plastic composition
  • Plastic composition used for wafer/mask carrier and reticle SMIF Pod by using plastic composition

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Embodiment Construction

[0046] The present invention is a plastic composition and a wafer / reticle carrier using the plastic composition. Among the specific embodiments of the carrier of the present invention and its components illustrated in the accompanying drawings, all about front and rear, left and right , top and bottom, upper and lower, and horizontal and vertical references are for convenience of description only, and do not limit the invention, nor limit its components to any position or spatial orientation. The dimensions specified in the drawings and description can be changed according to the design and requirements of the specific embodiments of the present invention without departing from the protection scope of the present invention.

[0047] In order to make the wafer / reticle carrier of the present invention have the effects described in the above embodiments, the present invention uses a plastic composition to make the wafer / reticle carrier. The plastic composition of the present inven...

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Abstract

The invention discloses a plastic composition used for a wafer / mask carrier and a reticle SMIF Pod by using the plastic composition. The plastic composition comprises a main body material which comprises polyether-ether-ketone and carbon nano-tube. The reticle SMIF Pod comprises a pedestal and a casing cover, a mask storage space is formed on the casing cover by relative to the pedestal, a support set is arranged on the pedestal for supporting a mask, the casing cover comprises a pressure guide group for limiting and guiding the mask; wherein, the pedestal, the support set, the casing cover and the pressure guide group are made by the plastic composition, the plastic composition comprises the main body material which comprises polyether-ether-ketone and carbon nano-tube. The plastic part of the mask carrier formed by polyether-ether-ketone containing carbon nano-tube is used for increasing hardness and antistatic effect, the wear resistance and the scratch resistance of the plastic part of the mask carrier can be greatly increased, dust or particle spalling of the material can be reduced, opportunity for destroying wafer / mask carrier surface can be reduced, harmful gas release is reduced, and phenomenon of haze generation on the wafer / mask carrier surface can be avoided.

Description

technical field [0001] The invention belongs to the technical field of a plastic composition, and specifically refers to a wafer / reticle carrier using the plastic composition, so as to meet the special antistatic, low Sulfide, wear resistance and high cleanliness and other requirements. Background technique [0002] In the semiconductor process, affected by the continuous innovation and miniaturization of semiconductor technology, chips made of semiconductor technology are widely used in various fields. Affected by the miniaturization of integrated circuits and the cost of manufacturing, the size of the wafer is getting larger and larger, but the number of chips per wafer is increasing, which makes the value of the wafer continue to increase. Therefore, any wafer on the process Problems can cause huge losses. And the yellow light process in the general integrated circuit process is an important process related to the overall yield. It is usually coated with an opaque or t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C08L61/16C08K7/00C08K3/04H01L21/673
Inventor 陈明生
Owner GUDENG PRECISION IND CO LTD
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