Method for manufacturing micro/nano composite structure based on 4D printing and nanoimprint lithography

Abstract

The invention discloses a method for manufacturing a micro / nano composite structure based on 4D printing and nanoimprint lithography. The method comprises the following steps: (1) transferring and copying a microstructure on a mold to an imprint material by adopting a nanoimprint lithography process, and manufacturing a microstructure; (2) selectively printing and depositing a self-assembly material on the microstructure by using electronic jet printing; (3) allowing the self-assembly material to be subjected to microphase separation, and self-assembling the nano structure; and (4) transferring and copying the nano structure to a target material. According to the invention, the advantages of technologies such as nanoimprint lithography, additive manufacturing, electrical jet printing and self-assembling are combined, high-efficiency low-cost large-scale manufacturing of a large-area micro / nano composite structure is realized, and the method has the obvious characteristics of excellent controllability, repeatability and consistency and high precision.

Description

technical field [0001] The invention belongs to the technical field of micro-nano manufacturing and additive manufacturing, and in particular relates to a method for manufacturing a micro-nano composite structure based on 4D printing and nano-imprinting. Background technique [0002] The micro-nano composite structure is a very important functional structure in nature (such as the superhydrophobicity of the lotus leaf, the strong adsorption of the gecko, the excellent anti-reflection and anti-reflection properties of the moth eye, etc.), and has a very wide range of uses. For example, the lotus leaf structure has excellent superhydrophobic and self-cleaning properties. The "lotus leaf effect" is mainly derived from the micro-nano composite structure on the surface of the lotus leaf, that is, countless micron-scale waxy papilla structures (average diameter 5-9 microns) are attached to the surface of the lotus leaf. There are many fluff-like structures with a diameter of 120 ...

AI Technical Summary

Problems solved by technology

[0003] Although micro-nano composite structures have huge and broad industrial application prospects, the current challenging problem is how to realize low-cost and mass-scale manufacturing of micro-nano structures, especially high-efficiency, low-cost, large-scale and controllable manufacturing of large-area micro-nano composites. The structure has always been a technical problem that needs to be broken through in the industry and academia at home and abroad, which seriously affects and restricts the wide commercial application of micro-nano composite structures.

In recent years, although scholars and researchers at home and abroad have proposed a variety of methods and strategies for manufacturing micro-nano composite structures, such as optical lithography, etching, self-assembly, electron beam lithography, focused ion beam, laser interference lithography, soft Lithography, nanoimprinting, etc., but they all have some limitations and deficiencies (such as patterned area, efficiency, cost, consistency, precision, repeatability, etc.), and the existing processes and solutions are still difficult Meet the requirements of industrial production applications

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