Manufacturing method of gainp/gaas/ingaasp/ingaas four-junction cascaded solar cell
A technology of solar cells and manufacturing methods, which is applied to circuits, photovoltaic power generation, electrical components, etc., can solve problems such as increasing the difficulty of battery technology, achieve high photoelectric conversion efficiency, reduce production costs, and reduce consumption
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[0029] The technical solutions in the embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0030] The fabrication method of GaInP / GaAs / InGaAsP / InGaAs four-junction cascaded solar cells is as follows:
[0031] 1) Cell growth before bonding
[0032] ginseng figure 1 As shown, a GaAs buffer layer of 0.2-1 μm is first grown on a GaAs substrate, and then a GaAs subcell, a second tunnel junction, a GaInP subcell, and a 500 nm GaAs contact layer are grown next.
[0033] ginseng figure 2 As shown, a 0.2-1μm InP buffer layer is first grown on the InP substr...
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