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Ronchi shearing interferometer based phase extraction method

A shearing interferometer and phase extraction technology, applied in the field of shearing interferometer, can solve the problem of difficult to eliminate the interference between the diffraction term and the 0th order, so as to eliminate the influence of the phase extraction accuracy, improve the measurement accuracy, and achieve accurate measurement. Effect

Active Publication Date: 2014-10-22
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

Both the object plane grating and the image plane grating of the interferometer use one-dimensional Ronchi gratings, and the 5-step phase shift method can reduce the influence on phase extraction caused by the interference of ±3-order and 0-order diffracted light, but it is difficult to eliminate other relatively High-order diffraction terms and 0-order interference

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  • Ronchi shearing interferometer based phase extraction method
  • Ronchi shearing interferometer based phase extraction method
  • Ronchi shearing interferometer based phase extraction method

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Embodiment

[0058] In the Ronchi shearing interferometer, the wavelength of light output by the light source 1 is 193nm, the numerical aperture of the measured optical system 6 is 0.75, the imaging magnification is 4×, the shear rate is set to 1 / 30, and the period of the checkerboard grating 702 is selected Pi is 3.86μm, and the period of the one-dimensional diffraction grating on the object plane is P o is 15.44 μm.

[0059] The object plane grating translation stage 5 is a three-dimensional translation stage that moves the first grating 401 and the second grating 402 into the optical path of the measured optical system 6 objects;

[0060] The image plane grating displacement stage 8 is a three-dimensional displacement stage that moves the checkerboard grating 701 into the image square optical path of the measured optical system 6, and drives the checkerboard grating 701 to move along the x direction and along the 1 / 8 grating period of the y direction. ;

[0061] The two-dimensional ph...

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Abstract

The invention discloses a Ronchi shearing interferometer based phase extraction method. A Ronchi shearing interferometer structure used in the Ronchi shearing interferometer based phase extraction method comprises a light source, a focusing lens, a scattering optical element, one-dimensional diffraction grating plates, a measured optical system platform, chessboard gratings, a two-dimensional photoelectric sensor and a computer. The one-dimensional diffraction grating plates and the chessboard gratings are arranged on an object plane and an image plane of the measured optical system and the phase is calculated due to collection of 9 interferometric fringe patterns with the shifting interval to be a quarter of pi to eliminate influences to the phase extraction accuracy from multi-level diffraction light in Ronchi shearing interference. The Ronchi shearing interferometer based phase extraction method has the advantages of eliminating the influences of diffraction items in higher levels other than the levels 0, 1 and minus 1, reducing the phase extraction system error in wave aberration detection and improving the wave aberration detection accuracy of the optical system.

Description

technical field [0001] The invention relates to a shearing interferometer, in particular to a phase extraction method based on the Ronchi shearing interferometer. Background technique [0002] Ronchi shearing interference is a shearing interference that uses an extended light source to modulate the spatial coherence of the light field. It has the advantages of not requiring a separate ideal reference wavefront, easy to achieve common optical path interference, no spatial optical path error, high detection accuracy, and high sensitivity. advantage. Ronchi shearing interferometry introduces the phase-shifting interferometry technology. By moving the grating laterally, a stable phase difference is introduced between the shearing wavefront and the 0th-order wavefront. By changing the phase shifting amount, multiple interferograms are obtained, and the measured phase distribution is calculated. Calculate the wave aberration of the measured optical system. In order to obtain the...

Claims

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Application Information

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IPC IPC(8): G01J9/02
Inventor 吴飞斌唐锋王向朝李杰李永
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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