Method for restoring state of semiconductor equipment software after restart

Abstract

The invention relates to a method for restoring state of semiconductor equipment software after restart. The method includes the following steps that: record files containing information of all carriers subordinated to actual equipment modules and information of all wafers in (subordinated to) the carriers are configured according to actual equipment process module attributes recorded in a technique storage unit; in a technical process, record files which record the information of all carriers subordinated to each of actual equipment modules and all wafers in the carriers are associated simultaneously according to the attribute information of all actual equipment modules of reflection technique storage equipment; and if semiconductor equipment software needs to be restarted or to be restored to a certain previous interruption point, a control module receives the record files which are checked by a user at an input interface, and selectively updates the information of the wafer carriers and the wafers in all or part of the modules before restart according to the record files or the state of equipment initialization.

Description

technical field [0001] The present invention relates to the technical field of factory automation (Factory Automation) of semiconductor equipment, and more specifically, relates to a technology of data recording and data recovery of a software system in a semiconductor equipment. Background technique [0002] The modern semiconductor equipment industry relies more on automation to improve productivity, and automation is the main means to achieve the operational goals of semiconductor manufacturers. The factory automation monitoring and management function of semiconductor equipment (Factory Automation) is a very important function of semiconductor equipment, and it is also the key to adding semiconductor equipment to the factory production line. From semiconductor wafer manufacturing to semiconductor packaging and testing, both are highly automated; using automated equipment to manufacture semiconductor devices has many advantages, such as automatic monitoring, precise respo...

AI Technical Summary

Problems solved by technology

[0005] However, at present, the data recording and data recovery technology of semiconductor diffusion equipment is relatively lacking, and it is impossible to guarantee that the actual state of the semiconductor diffusion equipment is consistent with the state recorded in the software when the software system is restarted, so that the device remains unchanged after the software restarts. To be able to run continuously and protect the safety of the wafer carrier (Carrier) and wafer (Wafer) in the equipment

Images