High-accuracy geographic sense measuring method in convex hyperboloid Hindle detection

Abstract

A high-accuracy geographic sense measuring method in convex hyperboloid Hindle detection relates to the field of aspherical surface detection and solves the problems of an existing method is low in accuracy, poor in repeatability and inaccurate in detection. The method comprises the steps of adjusting an interferometer, a Hindle ball mirror and a convex hyperboloid to carry out inference detection on the convex hyperboloid to enable a surface shape error root mean square value to be the minimum, placing a target ball of a laser tracker at the outer focal point of the convex hyperboloid, carrying out interference detection on the surface of the convex hyperboloid, adjusting the inclination and the defocus to the minimum, measuring space coordinates of the convex hyperboloid, using the laser tracker to measure the surface characteristics of the convex hyperboloid, moving the convex hyperboloid away, carrying out interference detection on the Hindle ball mirror, adjusting the inclination and the defocus to the minimum, placing the target ball of the laser tracker at the inner focal point of the convex hyperboloid, carrying out interference detection on the surface of the convex hyperboloid, adjusting the inclination and the defocus to the minimum, measuring space coordinates of the convex hyperboloid, and constructing and detecting an optical axis line and an interval to calculate out the geometric senses. The measuring accuracy of the high-accuracy geographic sense measuring method is about 0.05mm. Furthermore, the high-accuracy geographic sense measuring method is high in accuracy and good in repeatability.

Description

technical field [0001] The invention relates to the technical field of aspheric surface detection, in particular to a high-precision geometric quantity measurement method in convex hyperboloid Hindle detection. Background technique [0002] In the manufacture of optical aspheric surfaces, geometric parameters such as vertex curvature radius R and quadratic constant K are important parameters to describe aspheric surfaces. Only when the geometric parameters are controlled within the tolerance range of their design can the manufacturing requirements of aspheric surfaces be met and applied. into a high-quality imaging system. Different aspheric surface shape measurement structures require different measurement methods to complete. [0003] In convex hyperboloid detection, Hindle detection is often used as a surface shape detection method. Hindle detection is a kind of aberration-free point detection method. According to the characteristics of the hyperboloid, the spherical wa...

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Problems solved by technology

[0005] In order to solve the problems of low measurement accuracy (about 0.5 mm), poor measurement repeatability, and inaccurate measurement results in existing methods for measuring geometric quantities of convex hyperboloids, the present invention provides a convex hyperboloid Hindle suitable for large diameters and long curvature radiuses. A high-precision geometric quantity measurement method in detection, mainly measuring the radius of curvature R and the quadratic constant K of the convex hyperboloid

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