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Subwavelength antireflective structure device and manufacturing method thereof

An anti-reflection and sub-wavelength technology, applied in coatings and other directions, can solve the problem of limited anti-reflection effect of flat-top sub-wavelength anti-reflection structure, and achieve the effect of enhancing anti-reflection effect, avoiding external pollution, and low cost

Inactive Publication Date: 2014-09-17
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0004] However, according to the equivalent medium theory, the anti-reflection morphology with a flat-top structure such as a cylinder, a truncated cone, or a prism can be equivalent to a single-layer film, so the anti-reflection effect of the flat-top sub-wavelength anti-reflection structure is generally very limited.

Method used

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  • Subwavelength antireflective structure device and manufacturing method thereof
  • Subwavelength antireflective structure device and manufacturing method thereof
  • Subwavelength antireflective structure device and manufacturing method thereof

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Embodiment Construction

[0029] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0030] In view of the defect that the anti-reflection effect of the flat-topped sub-wavelength anti-reflection structure in the prior art is generally very limited, how to improve its structural shape as much as possible on the basis of the flat-topped sub-wavelength anti-reflection structure to obtain a gradual distribution of the equivalent refra...

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Abstract

The invention provides a subwavelength antireflective structure device and a manufacturing method of the subwavelength antireflective structure device. The subwavelength antireflective structure device comprises a flat-top subwavelength antireflective structure, and the flat-top subwavelength antireflective structure comprises a substrate and a flat-top surface microstructure etched on the substrate; the subwavelength antireflective structure device further comprises a non-flat-top structure, obtained in an oblique incidence depositional mode, above the flat-top surface microstructure; the non-flat-top structure and the substrate are made of the same material. Compared with the prior art, the subwavelength antireflective structure device can enhance the antireflective effect of a flat-top subwavelength antireflective structure in the prior art.

Description

technical field [0001] The invention relates to the technical field of sub-wavelength anti-reflection optics, in particular to a sub-wavelength anti-reflection structural device and a preparation method thereof. Background technique [0002] In order to reduce the surface reflection of the optical window, the traditional method is to prepare a single-layer or multi-layer anti-reflection film on the surface of the substrate. However, there are many problems with this method, such as poor adhesion, poor stability, weak corrosion resistance, thermal expansion mismatch, component penetration and diffusion, and limited choice of film materials. [0003] In recent years, subwavelength anti-reflection structures have become more and more popular as a new type of optical anti-reflection method. In general, periodic structures whose structure size is close to or smaller than the wavelength of light. Since the substrate and the surface anti-reflection structure belong to the same ma...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B1/11
Inventor 尚鹏熊胜明
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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