Pressure sensor based on optical fiber FP interferometer and manufacturing method of pressure sensor

Abstract

The invention relates to the technical field of optical fiber application, in particular to a pressure sensor based on an optical fiber FP interferometer and a manufacturing method of the pressure sensor. The method comprises the following steps that the end faces to be fused of two optical fibers are coated with liquid and fused, the coating liquid is vaporized in the fusion process, and a bubble is formed in the fused optical fiber; the fused optical fiber is cut off from the portion of the bubble, so that the bubble is divided into two bubbles which are located at the ends of the two cut-off optical fibers respectively; the two pressure sensors based on the optical fiber FP interferometer are formed preliminarily and the bubbles are FP cavities of the preliminarily-formed pressure sensors; the thickness of the bubble walls close to the ends of the optical fibers is monitored in real time and is adjusted, so that the thickness of the bubble walls is lower than a set value. According to the pressure sensor based on the optical fiber FP cavity and manufactured through the technical scheme, a full-optical-fiber structure is adopted and electromagnetic interference can be avoided. Meanwhile, the structure and the manufacturing technology of the pressure sensor are simple and reliability and sensitivity are high.

Description

technical field [0001] The invention relates to the field of optical fiber application technology, in particular to a pressure sensor based on an optical fiber FP interferometer and a manufacturing method thereof. Background technique [0002] FP interferometer (Fabry-Perot interferometer) has a wide range of applications in many fields, one of which is the pressure sensor based on FP interferometer. However, existing pressure sensors based on fiber optic FP interferometers have many defects. Some pressure sensors ensure the detection accuracy, but there are many components, which reduces the overall reliability of the system. In addition, this type of pressure sensor is often bulky, and the processing technology is relatively complicated. This type of sensor does not adapt to the current trend of gradually miniaturizing sensors. Some pressure sensors need to use harmful corrosive gas to corrode the inside of the optical fiber to form an FP cavity during the production pr...

AI Technical Summary

Problems solved by technology

Some pressure sensors need to use harmful corrosive gas to corrode the inside of the optical fiber to form an FP cavity during the production process, which will cause great danger to the human body

Some production methods need to use polishing technology to polish the end face of the connected optical fiber, which not only increases the production cost, but also the thickness of the polishing is not easy to control, resulting in low detection sensitivity

In general, the existing pressure sensors based on optical fiber FP interferometer basically have one or more defects as follows: complex structure, complex manufacturing process, high manufacturing cost, low reliability, low sensitivity, etc.

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