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Water temperature control circulating cooling system for diffusion pump of vacuum coating machine

A circulating cooling system and vacuum coating machine technology, applied in the electronic field, can solve the problems of wasting emergency water, failing to guarantee the safety threshold of the cooling system, and damaging the vacuum coating equipment, so as to avoid waste, realize linkage automatic control, and ensure safety. Effect

Active Publication Date: 2014-07-09
西安点云生物科技有限公司
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AI Technical Summary

Problems solved by technology

Although this system avoids water waste and environmental pollution very well, the disadvantage of this patented technology is that this system cannot guarantee whether the cooling water temperature in the cooling system is lower than the safe threshold for the normal operation of the vacuum coating equipment
Once the circulating water temperature exceeds the safe temperature limit for the normal operation of the vacuum coating equipment, the vacuum coating equipment will be damaged; the system will directly discharge the emergency water, wasting the emergency water

Method used

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  • Water temperature control circulating cooling system for diffusion pump of vacuum coating machine

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Embodiment Construction

[0017] The present invention will be described in further detail below with reference to the accompanying drawings.

[0018] refer to figure 1 , the circulating cooling water system of the present invention is mainly composed of two water storage tanks, a water storage tank, five water valves, two electromagnetic valves, two water pumps, vacuum coating equipment and a temperature measurement and alarm device. Connect as follows.

[0019] The water outlet pipe a at the bottom of the No. 1 water tank passes through the water valve 1 and the water pump M in turn. 1 , The water valve 3 is connected with the water inlet pipeline of the vacuum coating equipment 4 to form the cooling water inlet pipeline of the vacuum coating equipment 4 . water pump M 1 The right-angle end of the three-way interface between the water valve 3 is connected with the tap water port through the manual electromagnetic water valve 2 to form an emergency water inlet. The water outlet pipe b at the botto...

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Abstract

The invention discloses a water temperature control circulating cooling system for a diffusion pump of a vacuum coating machine, which mainly aims at solving the problems that when the temperature of cooling water is higher than the safety threshold value in the normal work of vacuum coating equipment in the prior art, the vacuum coating equipment is damaged and the emergency water entering the vacuum coating equipment is wasted in vain. The water temperature control circulating cooling system comprises two water boxes, a water storage tank, a water pump, the vacuum coating equipment, a control water valve, a manual solenoid valve and a temperature measuring alarm device. The water storage tank is connected with the water boxes by the manual solenoid valve; the vacuum coating equipment is provided with the temperature measuring alarm device and is connected with the solenoid valve so as to automatically control the whole circulating cooling system. The automatic control on the circulating water cooling system and the effective protection on the vacuum coating machine are achieved. The water temperature control circulating cooling system can be used for a vacuum coating experiment in a laboratory.

Description

technical field [0001] The invention belongs to the technical field of electronics, and further relates to a water temperature control circulating cooling system for a vacuum coating machine oil diffusion pump in the technical field of electronic equipment. The invention can be used for vacuum coating experiments in scientific research and teaching laboratories. Background technique [0002] When using vacuum coating equipment to prepare thin film materials, since the coating process must reach a certain degree of vacuum, oil diffusion pumps are generally used to achieve the vacuum conditions of vacuum coating. The cooling system is an important condition to ensure the normal operation of the oil diffusion pump, and it is also an extremely important system on the vacuum coating device. The cooling system used for vacuum coating usually adopts two methods: one is that the vacuum coating equipment is directly connected to the tap water pipe, and the water in the water pipe en...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/22C23C14/54
Inventor 张显常进
Owner 西安点云生物科技有限公司
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