Micro-cantilever beam array biochemical sensing apparatus based on piezoelectric scanning and method
A technology of array sensing and micro-beams, which is applied in the field of biochemical sensing, can solve the problems of affecting the detection quality of spot displacement, the adjacent distance cannot be adjusted, and the detection sensitivity is not high, so as to achieve convenient and fast positioning detection, simple structure and high efficiency. Effect
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Embodiment 1
[0089] Example 1. Measurement of temperature changes based on piezoelectric scanning microbeam array sensing method
[0090] 1. A commercial microbeam array (German micromotive company, such as Figure 5 As shown, the microbeams are 500 μm long, 90 μm wide, and 1 μm thick, and the surface is coated with a 0.02 μm thick gold layer. Batteries, thermostats, PSDs, A / D converters, computers such as figure 1 Shown) in the biochemical reaction pool.
[0091] 2. Modification of Microbeams and Related Configuration Adoption Figure 4 The capillary array nesting modification platform shown in .
[0092] 3. Fix a convex lens with a focal length of 10cm on a piezoelectric ceramic tube and place it in front of a semiconductor laser. After the piezoelectric ceramic tube is energized, the convex lens is driven to do periodic deflection together. The converged laser beam emitted by the laser is changed by a mirror and then periodically scans two fixed points on the substrate of the microb...
Embodiment 2
[0094] Example 2. Detection of Clenbuterol by Microbeam Array Biochemical Sensing Method Based on Piezoelectric Scanning
[0095] 1. Experimental Setup and Reagents
[0096] The specific structure of the detection system figure 1 As shown in , it mainly includes a laser (parameters: diameter 8mm, length 20mm, wavelength of laser emission is 650nm, diameter of laser focus spot is 200μm), piezoelectric deflector (composed of piezoelectric ceramic tube and lens, among which piezoelectric ceramic tube The length is 30mm, the outer diameter is 6.35mm, the inner diameter is 5.35mm, the maximum input voltage is ±200V, the deflection range is ±16μm; the focal length of the lens is 10cm, fixed at the end of one end of the piezoelectric ceramic tube), biochemical reaction pool (volume 0.5mL, full Sealed, composed of a sample inlet with an inner diameter of 1mm, a sample outlet with an inner diameter of 1mm, a glass plate, and a microbeam fixing table. Figure 11 ), temperature control...
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