Microwave power supply system

A technology of microwave power supply and microwave head, applied in the field of microwave system

Inactive Publication Date: 2014-06-04
JIANGSU LVYANG ELECTRONICS INSTR GROUP
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  • Description
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  • Application Information

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Problems solved by technology

[0002] With the continuous development of the solar energy industry and the continuous reduction of resources, the requirements for the manufacturing process of solar silicon wafers are getting higher and higher. In this case, it is difficult for the existing microwave control devices to meet the increasingly complex production requirements. A more complete control system to achieve

Method used

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Embodiment Construction

[0011] Such as figure 1 As shown, the microwave power supply system of the present invention includes a power input filter module, a three-phase power rectification module, a high-voltage inverter power generation module, a negative high-voltage generation module, a power sampling processing module, a pulse width adjustment module, and a CPU control module. Three-phase The power supply sequentially passes through the power input filter module and the three-phase power rectification module to generate DC voltage, and the DC voltage is sent to the high-voltage inverter power generation module to generate high-frequency and high-voltage pulses, and then enters the negative high-voltage generation module, which provides the microwave head The DC negative high voltage required by the cathode of the magnetron causes the magnetron of the microwave head to oscillate and emit microwaves; then the power generated by it is sampled and processed, and after calculation by the pulse width ad...

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Abstract

The invention relates to an energy apparatus. A microwave power supply system comprises a power supply input filtering module, a three-phase power supply rectification module, a high-voltage inverter power generation module, a negative high voltage generation module, a power sampling processing module, a pulse width adjustment module and a CPU control module. A three-phase power supply generates a DC voltage through the power supply input filtering module and the three-phase power supply rectification module in sequence; the DC voltage is sent to the high-voltage inverter power generation module to generate a high-frequency high-voltage pulse; the high-frequency high-voltage pulse is input to the negative high voltage generation module, and the negative high voltage generation module provides a DC negative high voltage needed by the negative pole of a microwave head magnetron, thereby enabling the microwave head magnetron to vibrate and emit microwaves; and then power generated by the microwave head magnetron is sampled, calculated by the pulse width adjustment module, and then is sent to the CPU control module which judges whether the value of the power generated by the microwave head magnetron is the needed value. The microwave power supply system is in a normal working state; and once abnormity occurs, the power supplying source of the system is cut off.

Description

technical field [0001] The invention relates to a microwave system, in particular to a device for supplying energy to a microwave generator. Background technique [0002] With the continuous development of the solar energy industry and the continuous reduction of resources, the requirements for the manufacturing process of solar silicon wafers are getting higher and higher. In this case, it is difficult for the existing microwave control devices to meet the increasingly complex production requirements. A more complete control system to achieve. Contents of the invention [0003] The technical effects of the present invention can overcome the above-mentioned defects, and provide a microwave power supply system, which controls the power of the microwave head, provides energy to the magnetron of the microwave head through this device, and can control the output power of the microwave head. [0004] In order to achieve the above object, the present invention adopts the follow...

Claims

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Application Information

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IPC IPC(8): H02M9/06H02H7/12
Inventor 陈晨高显扬
Owner JIANGSU LVYANG ELECTRONICS INSTR GROUP
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