Interference Microscope Objective Optical System

Abstract

The invention relates to an optical system of an interference microobjective. The optical system comprises a first lens set, a second lens set, a third lens set, a fourth lens set, an aperture diaphragm, a fifth lens set, a sixth lens set, a reference surface substrate set, and a split beam plain plate set, wherein the components are arranged in sequence from left to right along an optical axis; and the above-mentioned components from the first lens set to the split beam plain plate set form an objective lens set E of the system. The focus of the second lens set is fS2, the focus of the third lens set is fS3, and the focus of the objective lens set is fE1; and the three sets satisfy the following relationships: 1.2<|fS3 / fS2|1.8 and 3<|fS1 / fE1|<4. According to the invention, the interference microobjective with the optical system has characteristics of long work distance, large numerical aperture, ad low distortion in a visible light waveband; and the system imaging quality approaches diffraction limit.

Description

technical field [0001] The invention relates to an interference microscope objective lens, in particular to an interference microscope objective optical system. technical background [0002] With the continuous progress of micro-fabrication technology, micro-electronics, micro-optics, and micro-mechanical components continue to appear. This requires precise measurement of the microscopic three-dimensional shape of the above-mentioned components, and the measuring instrument needs to have high lateral resolution and vertical resolution. Unlike smooth surface measurement, surface topography measurement not only measures surface roughness or blemishes, but also surface profile, shape deviation and position deviation. [0003] The optical interference microscope is an instrument that uses the principle of optical interference to detect the three-dimensional microscopic appearance of components. It has the advantages of intuitive surface information and high measurement accuracy...

AI Technical Summary

Problems solved by technology

The 6JA interference microscope is based on the Linlike principle. Its reference light path and test light path are respectively on two mutually perpendicular optical axes. The error of any one of the light paths will cause the optical path to be out of adjustment, resulting in unstable interference fringes.

The working distance of 6JA interference microscope is small, only 0.5mm, which is inconvenient to use

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