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Process for preparing corrosion resistant metal material through coating tantalum or niobium with PVD (physical vapor deposition) method

A technology for corrosion-resistant metals and metal materials, applied in metal material coating technology, sputtering plating, ion implantation plating, etc., can solve problems such as high melting point and unsuitable anti-corrosion layer

Inactive Publication Date: 2014-04-02
NINGXIA ORIENT TANTALUM IND +1
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  • Summary
  • Abstract
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AI Technical Summary

Problems solved by technology

[0007] Due to the high melting point of metals such as tantalum and niobium, it is not suitable to make anti-corrosion coatings by metal thermal spraying

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0014] In this embodiment, magnetron sputtering is adopted, and a protective layer of tantalum and niobium is coated on the surface of the substrate by using a magnetron sputtering apparatus. The equipment model used: JGP-450A magnetron sputtering deposition system produced by Shenyang Scientific Instrument Development Center Co., Ltd., Chinese Academy of Sciences.

[0015] The principle is that the target as the cathode is under the action of an electromagnetic field, and the surface of the target produces a glow effect, and an ionized plasma gas is formed above the target. These energetic ions (mostly Ar ions) excite the target to make the target on the target Tantalum and niobium atoms are deposited onto the substrate.

[0016] The target used is a tantalum or niobium target with a purity of 99.96. The diameter of the target is 60 mm and the thickness is 5 mm. The surface area corresponding to the coated substrate and the target cannot exceed the area of ​​the target. Unde...

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Abstract

The invention relates to a process for preparing a corrosion resistant metal material through coating tantalum or niobium with a PVD (physical vapor deposition) method. The process is characterized by comprising a step of coating a tantalum or niobium protective layer on the surface of a metal material substrate through a magnetron sputtering way. The method disclosed by the invention improves anticorrosion and wear-proof performances of metal through a coating technology, and a required corrosion resistant coating is coated on surface of stainless steel or other metal surfaces through a physical vapor deposition (PVD) method; the PVD method includes a magnetron sputtering method, a multi-arc ion plating method, electron gun evaporation and the like. The method disclosed by the invention can improve abrasion and corrosion resistance of surface of a plated metal part, so as to prolong service life of metal or a metal container, and simultaneously improve application safety factor.

Description

technical field [0001] The invention relates to a process for coating tantalum or niobium by PVD method to produce corrosion-resistant metal materials. Background technique [0002] The problem of metal corrosion pervades all fields of national economy and national defense construction, and a large number of metal parts and equipment are scrapped due to corrosion. Equipment is the basis of chemical production. Chemical unit operations must rely on sophisticated equipment to achieve, because the chemical process is almost inseparable from heating and cooling, and many reactions are carried out in a closed environment (need to maintain a certain pressure or vacuum), and each Most of these chemical raw materials are corrosive to a certain extent, so the materials for manufacturing chemical equipment require corrosion resistance, high strength, and good ductility. Metal materials are the first choice for manufacturing chemical equipment due to their high strength and good ducti...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/16
Inventor 杨国启郑爱国王东新李军义张丽罗丹郑金凤
Owner NINGXIA ORIENT TANTALUM IND
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