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Method for preparing lithium tantalate chip for pyroelectricity detector

A technology of lithium tantalate and lithium tantalate, applied in the field of pyroelectric detectors, can solve problems such as difficult roughness and affecting device performance, and achieve the effects of less equipment investment, simple process, and cost reduction

Inactive Publication Date: 2014-04-02
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In the existing preparation method, although the thickness of the prepared lithium tantalate wafer meets the requirements, its roughness is a big problem, especially the scratches on the surface of the wafer directly affect the performance of the device and bring a lot of noise to the device

Method used

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  • Method for preparing lithium tantalate chip for pyroelectricity detector
  • Method for preparing lithium tantalate chip for pyroelectricity detector
  • Method for preparing lithium tantalate chip for pyroelectricity detector

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Embodiment Construction

[0018] The specific steps of the method for preparing a lithium tantalate wafer for pyroelectric detectors according to an embodiment of the present invention will be described in detail below with reference to the accompanying drawings.

[0019] In one embodiment of the present invention, a kind of method that prepares the lithium tantalate wafer that is used for pyroelectric detector is as figure 1 shown.

[0020] In this embodiment, in step 10, a lithium tantalate wafer with a predetermined thickness is firstly obtained, and the lithium tantalate wafer with a predetermined thickness is placed in a soaking solution for soaking treatment.

[0021] Here, the "predetermined thickness" may be a predetermined thickness according to actual needs. For example, in one embodiment, the predetermined thickness may be 100 microns.

[0022] In one embodiment, step 10 may include soaking the lithium tantalate wafer in ethanol solution and acetone solution respectively. For example, ste...

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Abstract

The embodiment of the invention provides a method for preparing a lithium tantalate chip for a pyroelectricity detector. The method comprises the steps of placing the lithium tantaliae chip with the preset thickness into a soaking solution to perform soaking and cleaning, moving the lithium tantalate chip onto a tool, fixing the tool on a driving disc and grinding and polishing the lithium tantalate chip. The method disclosed by the embodiment of the invention is simple in process, less in equipment investment and shorter in period, so the cost is favorably reduced, and the chips can be favorably prepared in a large-scale mode.

Description

technical field [0001] The invention relates to the technical field of pyroelectric detectors, in particular to a method for preparing lithium tantalate wafers for pyroelectric detectors. Background technique [0002] The pyroelectric infrared detector is made of high-quality pyroelectric materials such as lithium tantalate (LiTaO3) (the order of magnitude of p is 10 -8 C / K.cm 2 ) as the response element, plus brackets, shells and windows. It is not selective for wavelength when it works at room temperature. But the fundamental difference between it and other heat-sensitive infrared detectors is that the latter uses the temperature rise value of the response element to measure infrared radiation, and the response time depends on the establishment process of the new equilibrium temperature, which takes a long time and cannot measure rapid changes radiation signal. Pyroelectric detectors, on the other hand, use the rate of temperature change and thus can detect rapidly cha...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B37/04G01J5/10
CPCB24B37/10C09K3/1463G01J5/10
Inventor 刘子骥梁志清蒋亚东黎威志
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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