Preparation method of reflective film for laser resonator cavity mirror

Abstract

The invention discloses a reflection film used for a cavity mirror of a laser resonator cavity with high reflectivity and a preparation method thereof. The reflective film used for the laser resonator cavity mirror includes an internal vacuum box, the top of the box is made of light-transmitting material, and the box is provided with a base and a multi-layer high refractive index film layer. Multiple layers of high refractive index film layers are sequentially stacked on the upper surface of the substrate, and a supporting column is arranged between the two adjacent layers of high refractive index film layers, and the supporting column makes the adjacent two layers of high refractive index film layers There is a gap between the layers to form a vacuum layer. The reflective film of the present invention uses a vacuum layer with a lower refractive index to replace the low-refractive film layer in the traditional reflective film, which can greatly improve the reflectivity of the reflective film without changing the number of film layers, and the light wave is There is no energy loss during the propagation of the vacuum layer, which can increase the output light intensity to a certain extent and improve the quality of the laser beam. It is suitable for popularization and application in the field of optical devices.

Description

technical field [0001] The invention relates to the field of optical devices, in particular to a method for preparing a reflective film for a laser resonator cavity mirror. Background technique [0002] Multilayer films are widely used in military and civilian fields, such as planar waveguides in optical fiber communications, optical resonators in laser transmitters, luminescent coatings and coloring films on the surface of various glass-ceramic materials, etc. With the development and maturity of high output power narrow-spectrum wide light source, high-speed optical modulation technology, broadband optical amplification technology and high bit rate dense wavelength division multiplexing (DWDN), optical time division multiplexing (OTDM), optical soliton transmission and other technologies , and new requirements have also been put forward for the requirements of highly reflective multilayer films. The output power of some lasers is very dependent on their reflectivity. Acco...

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Problems solved by technology

[0004] The principle of the traditional reflective film used for laser resonator cavity mirror is to use the interference effect of light to increase the reflectivity, which is closely related to the wavelength of light; and the more the incident light deviates from the center wavelength, the more severe the reflectivity drops, and the high reflective film only High reflection is generated within a certain range, therefore, the reflectivity of existing reflective films used for laser resonator cavity mirrors is generally low; and with the increase of the number of film layers, the emissivity increases and the reflectivity increase decreases. The range becomes narrower, the difficulty of plating increases, and the yield rate decreases

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