Method for preparing graphene and porous amorphous carbon films simultaneously

Abstract

The invention discloses a method for preparing graphene and porous amorphous carbon films simultaneously. The method comprises the following steps: S1, ultrasonically cleaning a metal nickel sheet substrate, drying the metal nickel sheet substrate and placing the metal nickel sheet substrate into a tube furnace; S2, introducing inert gases into the tube furnace; S3, heating the tube furnace to 750 to 1,000 DEG C and maintaining for 10 to 50 minutes, introducing hydrogen into the tube furnace, and performing heat treatment on the metal nickel sheet substrate; and S4, introducing hydrocarbon compounds with the flow quantity of 20 to 100 sccm into the tube furnace, cracking the hydrocarbon compounds under the catalysis of the metal nickel sheet substrate subjected to heat treatment, dissolving carbon by a nickel sheet, and growing graphene and porous amorphous carbon films simultaneously; and S5, cooling the tube furnace, soaking the nickel sheet, on which the graphene and the porous amorphous carbon films grow, into corrosive liquid, and corroding the substrate nickel sheet to obtain the graphene and the porous amorphous carbon films. The hydrocarbon compounds serve as carbon sources, the adsorption cracking of the carbon sources on the surface of the substrate nickel sheet under the high temperature condition is controlled, and carbon atoms are dissolved into the nickel sheet, so that the graphene and the porous amorphous carbon films can be obtained simultaneously.

Description

Technical field [0001] The invention belongs to the technical field of film preparation by chemical vapor deposition, and more specifically, relates to a method for simultaneously preparing graphene and a porous amorphous carbon film. Background technique [0002] Carbon is one of the most abundant elements in nature, and carbon materials composed of carbon have many allotropes. In 2004, Geim and others of the University of Manchester in the United Kingdom prepared and observed a special carbon film on a piece of graphite for the first time using a mechanical separation method-single-layer graphite (graphene), thus starting the research boom of graphene materials. Graphene is composed of a single layer of atoms and has a two-dimensional honeycomb structure. This special structure gives the graphene material unique optical, electrical, thermal and mechanical properties. These superior properties have shown great application potential in nanoelectronic devices, lithium-ion battery...

AI Technical Summary

Problems solved by technology

However, there are several problems in all these technologies. One is that the carbon film preparation process has a high ambient temperature. Therefore, generally, the amorphous carbon film is prepared on a hard substrate (such as quartz glass, mica, silicon wafer or directly on the surface of the workpiece). , so that the application of amorphous carbon films is subject to certain restrictions; second, the amorphous carbon films prepared by these techniques are dense films, and porous carbon films cannot be obtained; third, most of the amorphous carbon films prepared by these techniques are diamond-like amorphous crystalline carbon film; the fourth is that these technologies cannot obtain a self-supporting amorphous carbon film with a special structure, and the self-supporting amorphous carbon film can be easily transferred to any substrate

It can be seen that there are some defects in the current preparation technology of amorphous carbon thin film, which restrict its basic research and application.

Images