Method for observing and measuring interfacial fracture toughness of fragile film on hard substrate

Abstract

The invention discloses a method for observing and measuring the interfacial fracture toughness of a fragile film on a hard substrate. The method for observing and measuring the interfacial fracture toughness of the fragile film on the hard substrate includes the following steps: carrying out a nanoindentation test on a 500nm-thick TiN (titanium nitride) film deposited on a Si (silicon) substrate, and obtaining a loading-unloading curve of an indentation at an indentation depth of 1,000nm; carrying out in-situ indentation scanning to obtain a three-dimensional topography of the indentation, and acquiring from the topography the interfacial fracture radius CR and the film tilting height H after the fracture; determining the energy U necessary for the interfacial fracture between the film and the substrate, and obtaining the interfacial fracture toughness of the fragile TiN film on the hard Si substrate. The method provided by the invention has the advantage that through the integration of the indentation loading-unloading curve and the in-situ three-dimensional topography, energy released by the interfacial fracture of the film and the interfacial fracture size can be accurately determined, so that the interfacial fracture toughness of the film can be accurately obtained.

Description

technical field [0001] The invention belongs to the technical field of nanometer materials, in particular to a method for observing and measuring the interface fracture toughness of a brittle film on a hard substrate. Background technique [0002] With the advancement of modern manufacturing, the processing of materials is becoming more and more difficult. The emergence of coated tools is considered to be a major revolution in the history of metal cutting tools. Coating hard thin film materials on the surface of cutting tools just meets the high technical requirements of modern manufacturing for metal cutting tools. Hard coating materials are initially limited to single materials such as TiN, ZrN, and VN. However, in more and more environments, a single coating is far from meeting the requirements of use. At the same time, hard nano-multilayer film and composite film coating have also been developed rapidly. [0003] Despite the high hardness of these hard and brittle fil...

AI Technical Summary

Problems solved by technology

[0003] Despite the high hardness of these hard and brittle films mentioned above, when these films are coated on the tool surface, the actual working life of the coating is a matter of great concern

The disadvantage of these hard film materials in practical application is that they are very vulnerable to external shocks and produce microcracks during the processing of workpieces, which makes these films lose their due effect of increasing tool life.

Interfacial fractures are difficult to observe as they occur between the film and substrate

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