Ceramic pressure sensor chip capable of accurately trimming temperature drift error, trimming system and trimming method

Abstract

The invention relates to a ceramic pressure sensor chip capable of accurately correcting and adjusting the temperature drift error, a correcting and adjusting system and a correcting and adjusting method. An existing ceramic pressure sensor does not correct and adjust the temperature drift error conveniently, and the equipment and technology for industrialization correcting and adjusting are lacked. The ceramic pressure sensor chip comprises a chip body, a Wheatstone bridge circuit inside the chip body is connected with a combined temperature drift compensation resistor, the combined temperature drift compensation resistor comprises an correctable and adjustable resistor and a plurality of rough adjusting resistors, the two ends of each rough adjusting resistor are connected to two printed metal foil wires respectively, and the correctable and adjustable resistor is connected to one metal foil wire in series. The temperature drift correcting and adjusting system comprises a temperature drift sorting system and a temperature drift correcting and adjusting system. The invention further relates to the corresponding temperature drift correcting and adjusting method. The ceramic pressure sensor chip has the advantages of being simple in structure and capable of accurately correcting and adjusting the temperature drift error in an industrialization mode, the correcting and adjusting system and the correcting and adjusting method are scientific in design, high in efficiency, low in cost and suitable for being used by ceramic pressure sensor manufacturing enterprises.

Description

technical field [0001] The invention relates to a ceramic pressure sensor chip, a trimming system and a trimming method capable of accurately trimming temperature drift errors. Background technique [0002] The ceramic pressure sensor is to print electronic paste on the ceramic matrix elastomer, and after sintering, it becomes a Wheatstone bridge (Wheatstone bridge, also known as Wheatstone bridge, Wheatstone bridge). Due to the slight deformation of the ceramic substrate due to the pressure, the change of the pressure sensitive resistance is caused. When a DC voltage of 5V is applied to both ends of the bridge arm, the pressure measurement is realized by measuring the voltage change of the output terminal of the middle section of the two bridge arms. The amplitude of the output voltage is proportional to Pressure value, so it is called a pressure sensor. [0003] However, in the printing and sintering process of electronic paste, there are inevitably slight differences. Th...

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Problems solved by technology

[0003] However, in the printing and sintering process of electronic paste, there are inevitably slight differences. These slight differences cause the output voltage of each ceramic pressure sensor to be different at the same temperature. The difference between these output voltages and the designed output voltage of the ceramic pressure sensor is the temperature. Drift error, referred to as temperature drift error, how to quickly correct temperature drift error is the bottleneck restricting the ceramic pressure sensor manufacturing industry

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