Label-based communication method for semiconductor device in remote control

Abstract

A label-based communication method for a semiconductor device in remote control comprises the steps of first establishing an SECS information template assembly, establishing SECS connection between the device side and the host side and then performing SECS information transmitting and receiving between the device side and the host side. The SECS information template assembly comprises a device-side SECS information template assembly and a host-side SECS information template assembly, wherein the device-side SECS information template assembly comprises multiple device-side SECS information templates which are respectively configured for each production function, and the host-side SECS information template assembly comprises multiple host-side SECS information templates including SECS information formats corresponding to production functions in international SEMI standard E5 and all of necessary labels. All of necessary labels include one information label and all of necessary variable data item labels, wherein all of necessary variable data item labels are all of variable data item labels owned by the SECS information formats, and one variable data item label is necessarily provided for each variable data item.

Description

technical field [0001] The invention relates to the technical field of network communication protocols. In the SECS communication based on the SEMI standard, the SECS II information format specified by the SEMI standard E5 is used; specifically, the present invention specifies a method for implementing SECS II information on the basis of the SEMI standard E5. Background technique [0002] The semiconductor manufacturing production line requires high cleanliness and high dust-free, especially on the wafer manufacturing line, most of the manufacturing equipment works in a high vacuum state, and manual operation is likely to cause the leakage of harmful gases; with the increase in the complexity of the manufacturing process, Before and after the start of each process, there will be a certain amount of data interacting between the equipment and the manufacturing execution system and other software systems (such as advanced process systems, etc.). It is impossible to manually i...

AI Technical Summary

Problems solved by technology

The international semiconductor industry SEMI standards E4, E5, and E37 respectively stipulate the protocol and format of SECS communication, among which E5 stipulates the definition and meaning of SECS information, but does not give the method or way of implementation, resulting in many different implementations Method, such as the method of using XML format that has appeared in recent years, the disadvantage of this method is that it does not use the SECS information format defined in SEMI standard E5, which makes the difference between the sent information and the actually defined format, and there is no definition in E5 It is so intuitive and easy to read; at present, the method commonly used in the world is still the method 15 years ago, that is, using the format definition in E5, but introducing structure, pre-function, post-function, general labels, etc. in the definition, now The technical labeling rule is: for a SECS information, a label can be used or not, the label cannot completely identify the SECS information template, and there is no one-to-one correspondence between the label and the SECS information template

The disadvantage of this method is that it makes the implementation of SECS communication complicated, and the control system of the equipment needs to process the SECS information itself, but the control system of the equipment is only interested in the equipment data or instruction data in the SECS information, which is completely unnecessary Knowing the auxiliary data in the SECS information, this method is based on the software technology 15 years ago and is suitable for structured computer programming. However, the object-oriented software technology has been fully developed in the past 10 years, and this technology has been unable to completely match it. matched

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