Six-degree-of-freedom active vibration isolation device

Abstract

The invention discloses a six-degree-of-freedom active vibration isolation device, which has the six-degree-of-freedom vibration isolation and positioning functions. The device comprises a lower platform, an upper platform and six support legs, wherein the six support legs are respectively connected with the upper platform and the lower platform through fixing blocks to form a Stewart parallel mechanism, the positions of the three fixing blocks on the lower platform are arranged in an equilateral triangle shape, the positions of the three fixing blocks on the upper platform are also arranged in an equilateral triangle shape, the six support legs are same in the structure, two adjacent support legs are mutually vertical with each other, each support leg comprises an active executer and an air spring which are formed into a parallel structure, and each air spring is used as a passive vibration isolation part. The device has the advantages that the combined method of active vibration isolation and passive vibration isolation is adopted, the ultra-low inherent frequency is realized, and the vibration with frequency exceeding the inherent frequency is effectively isolated; the good attenuation on the six-degree-of-freedom vibration is realized, and the precise positioning of six degrees of freedom is realized.

Description

technical field [0001] The invention belongs to the technical field of ultra-precision vibration reduction, and in particular relates to a six-degree-of-freedom active vibration isolation device. The six-degree-of-freedom active vibration isolation device involved in the present invention has vibration isolation and positioning functions, and can be used for vibration isolation of high-precision equipment such as photolithography machines, precision machine tools, precision measurement equipment, and aerospace precision instruments. Background technique [0002] With the continuous development of science and technology, precision manufacturing equipment and precision measuring equipment represented by IC manufacturing equipment, high-resolution electron microscopes, surface roughness testers and precision optical equipment have been more and more widely used. The requirements for precision are getting higher and higher. As an important basic equipment to achieve high precis...

AI Technical Summary

Problems solved by technology

[0003] Chinese patent document CN101382178 (publication number) discloses an active vibration reduction and vibration isolation device and an active vibration reduction and vibration isolation system. This patent document uses three or more active vibration reduction and vibration isolation devices to form a vibration reduction system to support the load and realize the load The main problem of this technology is that the vibration reduction system is composed of multiple vibration reduction devices, which is bulky and expensive

[0004] Chinese patent document CN101398052 (publication number) discloses a heavy-duty precision shock absorber and a shock absorbing system composed thereof. This patent document uses an air spring as a vertical passive vibration isolation component, and an inverted pendulum as a horizontal passive vibration isolation component. The linear motor is used as the active actuator. The main problem of this patent is that only the linear motor outputs the active control force in the horizontal direction, so the active force in the horizontal direction is small, which limits the vibration isolation and vibration reduction of the vibration reduction system in the horizontal direction. GPS

[0005] U.S. Patent US5844664 (publication number) discloses a kind of damping system, and this damping system is made up of a plurality of dampers, and each damper is formed by the combination of air spring and linear motor, and the main problem of this patent document is, a The vibration damping system is composed of multiple shock absorbers, which is bulky and cannot be used in space-constrained situations such as aviation, and its cost is also relatively high

[0006] The AIS vibration damping system disclosed by German Bilz Company (http: / / www.bilz.ag / en) uses a full air spring vibration isolation system, which uses three or more shock absorbers to form a vibration damping system , a single shock absorber contains a vertical air spring and 4 horizontal air springs, and a system contains at least 15 air springs. This solution can provide a large horizontal output force, but its structure is complex and the cost is high

[0007] In short, the above-mentioned published documents are useful for vibration isolation, but they are large in size and inconvenient to use

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