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An experimental device for a compact magnetic levitation workbench

A magnetic levitation workbench and experimental device technology, applied to teaching models, educational tools, instruments, etc., can solve the problems of high manufacturing cost, low positioning accuracy, slow response speed, etc., to overcome low positioning accuracy, improve motion accuracy, reduce small mass effect

Inactive Publication Date: 2016-03-30
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the traditional superimposed two-dimensional positioning platform cannot get rid of its essential shortcomings: low positioning accuracy, slow response speed, high manufacturing cost, and cannot be used in a vacuum ultra-clean environment, etc.
But this type of platform cannot be used in a vacuum environment
Coupled with its low rigidity, easy to cause high-frequency vibration and other shortcomings, it is difficult to meet the needs of high-precision positioning

Method used

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  • An experimental device for a compact magnetic levitation workbench
  • An experimental device for a compact magnetic levitation workbench
  • An experimental device for a compact magnetic levitation workbench

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Experimental program
Comparison scheme
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Embodiment Construction

[0033] The present invention will be described in detail below in conjunction with the accompanying drawings.

[0034] see figure 1 -2, the present invention includes a stator part and a mover part, the stator part includes a base 12 and a cylindrical stator cover 1 arranged on the base 12, the top end of the stator cover 1 is provided with a circular top cover 6; The mover part includes the mover 9, the mover 9 is arranged in the stator cover 1, the mover 9 adopts the upper hollow structure, and the mover 9 is a hollow hexagonal structure processed by steel (that is, the upper part of the mover 9 is hollowed out) , the stage 4 and the support column 3 are made of aluminum, so that on the one hand, the mass of the mover can be reduced; The disturbance caused by the horizontal drive to the vertical drive realizes the decoupling of the design of the maglev platform. Because the upper part of the mover 9 is hollowed out, a mover cover 11 is provided on the top of the mover 9, a...

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Abstract

An experimental device of a compact magnetic levitation worktable comprises a stator portion and a rotor portion. The stator portion comprises a base and a cylindrical stator housing arranged on the base, and a circular top cap is arranged at the top end of the stator housing. The rotor portion comprises a rotor arranged in the stator housing, a support column is fixed on the rotor and penetrates the top cap, and an objective table is arranged at the top of the support column. A plurality of first electromagnets used for vertical driving and a plurality of first eddy current sensors used for detecting vertical displacement are arranged on the top cap, and a plurality of second electromagnets used for horizontal driving and a plurality of second eddy current sensors used for detecting horizontal displacement are arranged on the side wall of the stator housing. The experimental device suitable for precise positioning magnetic levitation worktables is designed in order to meet the requirement on ultraprecise positioning, can be used for positioning of lithography machine wafer stages, can also be used for laser processing or other occasions needing micro-motion worktables, and is particularly suitable for occasions needing vacuum and free of friction.

Description

technical field [0001] The invention belongs to the technical field of precision machining and testing equipment, and in particular relates to an experimental device of a compact magnetic levitation workbench. Background technique [0002] Precision motion platforms are widely used in integrated circuit manufacturing, micro-mechanical assembly, biological cell operations, ultra-precision machining and measurement, and micro-surgery. However, the traditional superimposed two-dimensional positioning platform cannot get rid of its essential shortcomings: low positioning accuracy, slow response speed, high manufacturing cost, and cannot be used in a vacuum ultra-clean environment, etc. Common alternatives currently include: piezoelectric precision motion platforms, air-floating precision motion platforms, and magnetic levitation precision motion platforms. [0003] Piezoelectric precision motion platforms have high static stiffness and fast response, and are often used in high-...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G09B23/18
Inventor 张东升盛晓超梅雪松周进王凯
Owner XI AN JIAOTONG UNIV
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