A coarse and fine moving stacking worktable

Abstract

A coarse / precision laminated workbench is mainly applied in semiconductor photoetching equipment. The workbench provided by the invention contains a first electromagnetism driver module for driving a precision stage to rotate around the Z axis in the X,Y directions in a horizontal plane and a second electromagnetism driver module for driving the precision stage to rotate around the X, Y axis in the Z direction. There are respectively four groups of the first and second electromagnetism driver modules. Four first electromagnetism driver modules and four second electromagnetism driver modules are arranged alternatingly. A permanent magnet, a yoke and a permanent magnet framework of each first electromagnetism driver module and a permanent magnet and a permanent magnet framework of each second electromagnetism driver module together form a runner part of the precision stage. Coils, coil skeletons and microchecker bases of the four first electromagnetism driver modules and the four second electromagnetism driver modules together form a stator part of the precision stage. The coarse / precision laminated workbench provided by the invention has a simpler and more compact structure, is centroid driven and has small inertia of the runner of the microchecker.

Description

technical field [0001] The invention relates to a precision motion table, in particular to a six-degree-of-freedom precision motion table, which is mainly used in semiconductor photolithography equipment and belongs to the technical field of ultra-precision processing and detection equipment. Background technique [0002] The precision table with high precision and fast response has an extremely important position in modern manufacturing technology, and is regarded as an important symbol of a country's high-tech development level. In ultra-precision machine tools, the ultra-precision precision table is used to compensate the error of the feed system to achieve ultra-precision machining; in the manufacture of large-scale integrated circuits, the ultra-precision fine table is used Feed; In scanning probe microscope, the ultra-precision fine motion table is used to measure the surface topography of the sample and perform nano-processing; in bioengineering, the ultra-precision f...

AI Technical Summary

Problems solved by technology

[0005] Due to factors such as the frictional damping nonlinearity of the support system, the first two types of micro-motion stages cannot meet the requirements of high speed, large load, and high dynamic characteristics of lithography equipment.

The micro-motion table with voice coil motor / air support can meet the requirements of lithography equipment, but it has poor structural integrity, thick table body, high center of mass, etc., and its performance is limited to a certain extent.

[0006] Tsinghua University applied for a six-degree-of-freedom precision stage on June 29, 2007 (application number: 200710118130.5), providing a six-degree-of-freedom precision stage for silicon wafer stages in lithography machines, using frictionless damping The voice coil motor is used as the driving structure, although the positioning accuracy is greatly improved, but the structure is large and not compact, and cannot well meet the needs of the dual switching system

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