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Process water device

A technology of control devices and process devices, applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve problems such as poor safety and prone to safety accidents, and achieve troubleshooting, reduce safety problems, and reduce production accidents The effect of the probability

Active Publication Date: 2016-03-09
SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] However, the existing process water installations have poor security and are prone to safety accidents

Method used

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Experimental program
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Embodiment Construction

[0032] As mentioned in the background, there are problems with the safety of existing process water devices.

[0033] The inventors of the present invention have found that for existing process water devices, please continue to refer to figure 1 , the cold water pipeline 103 in the water tank 100 is immersed in the process cooling water 110 in the water tank, when the cold water in the cold water pipeline 103 circulates, the process cooling water 110 can be cooled; however, due to the internal circulation of the cold water pipeline 103 There is a pressure difference between the flowing cold water and the process cooling water 110 in the water tank 10, so it is easy to cause the rupture of the cold water pipe 103, and then cause the cold water in the cold water pipe 103 to overflow into the water tank 100, causing the water tank 100 to be mixed with the cold water pipe The liquid level of the process cooling water of the cold water in 103 rises; once the liquid level in the wat...

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Abstract

A process water device comprises a water channel used for carrying liquid, a cool water pipeline in the water channel, a water filling nozzle on the side wall of the water channel, a water leakage detection device fixed on the surface of the outer wall of the water channel, and a control device used for receiving a detection signal transmitted by the water leakage detection device to stop the work of the process device, wherein the liquid is used for conducting heat replacement on a semiconductor manufacturing process device, the cool water pipeline is partially or all located below the liquid level of the water channel and is used for cooling the liquid in the water channel, the liquid is filled in the water channel through the water filling nozzle, the water leakage detection device corresponds to the water filling nozzle in position, and the water leakage detection device is used for detecting whether the water filling nozzle leaks water and transmitting the detection signal when the amount of water leaked from the water filling nozzle reaches the preset amount. The safety of the process water device is improved.

Description

technical field [0001] The invention relates to the field of semiconductor process equipment, in particular to a process water device. Background technique [0002] In the semiconductor manufacturing process, the process equipment needs to be cooled, and the cooling of the equipment is usually completed by a process cooling water (Process Cool Water, PCW) system. The process cooling water system delivers cooled water to the process equipment, and transports the water passing through the process equipment back to the process cooling water system to complete the cooling of the process equipment. [0003] Such as figure 1 Shown is a schematic structural view of a process water device in the prior art, including: [0004] A water tank 100, the water tank 100 is used to hold the process cooling water 110, and the process cooling water 110 is used to cool the process device (not shown); [0005] A process water inlet pipe 101 and a process water outlet pipe 102 connected to the...

Claims

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Application Information

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IPC IPC(8): H01L21/02
Inventor 王华钧解毅何雅彬朱义党胡可绿郑修锋忻圣波
Owner SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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