Process method for preparing soft element and soft substrate on CVD (chemical vapor deposition) graphene

Abstract

A process method for preparing a soft element and a soft substrate on a CVD (chemical vapor deposition) graphene belongs to the technical field of nano-carbon (graphene) soft electronics. The method comprises the steps of preparing the soft electronic element function structure on a graphene layer growing on a metal catalyst substrate slice by using CVD, and then preparing the soft substrate on the soft electronic element function structure; separating the metal catalyst substrate slice from the graphene layer by adopting an electrochemistry bubbling method; taking the graphene product as a cathode for performing direct current electrolysis on water in an electrolytic cell, enabling the hydrogen bubbles generated from the cathode to permeate into the boundary between the metal catalyst substrate slice and the graphene layer under the assistance of electrolyte to finally separate the metal catalyst substrate slice and the graphene layer; and finally coating a graphene passivating layer on the surface. The process method for preparing the soft element and the soft substrate on the CVD grapheme is capable of shortening process flow, reducing the cost and reducing the heavy metal pollution on the environment.

Description

Technical field [0001] The invention relates to a process method for preparing a flexible device and a flexible substrate on CVD graphene, in particular to a process for preparing a flexible device and a new substrate on CVD graphene and then separating it from a catalyst by electrochemical bubbling. (Graphene) in the field of flexible electronics technology. Background technique [0002] With the development of society, people hope that electronic products (computers, mobile phones, lighting...) will be flexible, which gives birth to flexible electronics. Because it is based on organic materials, it can be burned, and basically no electronic waste is left. It is good for the environment and is considered to be one of the development trends of next-generation electronics. Graphene is a layer of sp2 hybridized carbon atoms. It won the Nobel Prize in Physics in 2010. It combines the advantages of ultra-thin, cheap, broad-spectrum transparency, electrical conductivity, thermal cond...

AI Technical Summary

Problems solved by technology

[0003] In order to solve the technical bottleneck in the practical application of CVD graphene, the present invention adopts the opposite process to the traditional technology, that is, the core functional devices are prepared first, until the new substrate is prepared, and then the electrochemical bubbling method is used The graphene device firmly adsorbed on the new substrate is separated from the metal catalyst, thus avoiding the problem of graphene damage caused by poor adsorption when the protective film is removed, and essentially improving the reproducibility, so that similar research is no longer limited to basic scientific research, its industrial application becomes possible

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