Crystal direction finder for directly measuring deflecting angle in crystal orientation and measurement method thereof

Abstract

The invention provides a crystal direction finder for directly measuring deflecting angle in crystal orientation, which is characterized in that one side of an objective table is connected with an X-ray generator, and the other side is connected with an X-ray detector, and an objective table is provided with a horizontal revolving bench, and the horizontal revolving stage can revolve a crystal to be measured parallely to the light propagation surface, and the center of the horizontal revolving bench is fixed with a vertical revolving stage, and the vertical revolving stage can revolve the crystal to be measured on the plane which is perpendicular to the light propagation surface; the crystal direction finder is used for directly finding the intersection line of the machined surface and the crystal face, and an angle measuring instrument of the objective table can be used for directly reading the deflecting angle beta in crystal orientation. The invention overcomes the defects that the present X-ray crystal direction finder has a complex operating method, wherein, the measurement process needs multiple times of rotations, dismountings and fixations of the detected crystal with low measurement efficiency, which is easy to induce cumulative errors and X-ray leakage.

Description

technical field [0001] The invention belongs to the field of crystal structure detection, and in particular relates to a crystal orientation instrument and a measurement method for directly measuring the crystal orientation of a single crystal by using an X-ray diffraction orientation method. Background technique [0002] Single crystal materials generally have anisotropy, and its crystal orientation is an important parameter for the application of single crystal materials. Determination of crystal orientation and deviation angle of single crystal is an important content of single crystal inspection. [0003] Usually, the processing surface of a single crystal material deviates from a certain crystal plane (usually a low-index crystal plane, such as (100), (111)) at a certain angle, which is expressed by the dihedral angle between the crystal plane and the processing plane, that is Crystal orientation deviation angle β (such as figure 1 shown). [0004] A single crystal c...

AI Technical Summary

Problems solved by technology

[0025] The present invention provides a crystal orientation instrument and method for directly measuring the deviation angle of the crystal orientation, so as to overcome the complicated operation method of the existing X-ray crystal orientation instrument, which needs to be rotated, disassembled and fixed many times during the measurement process, the measurement efficiency is low, and it is easy to cause accumulation. Errors and X-ray leakage, the final deviation angle is obtained through data calculation, unintuitive defects

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