Atmosphere plasma processing device suitable for aspheric optical element with large calibre

A technology for plasma and optical parts, applied in electrical components, discharge tubes, circuits, etc., can solve the problems of low processing efficiency, unable to meet the large-scale demand for large-diameter optical components, etc., to improve processing efficiency and promote the rapid separation from the workpiece surface. , a wide range of effects

Inactive Publication Date: 2013-07-31
HARBIN INST OF TECH
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Problems solved by technology

[0006] The purpose of the present invention is to provide an atmospheric plasma processing device suitable for large-diameter aspheric optical parts, in order to solve the low processing efficiency of traditional mechanical polishing technology and cannot meet the mass demand for large-diameter optical components in the optical field question

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  • Atmosphere plasma processing device suitable for aspheric optical element with large calibre

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specific Embodiment approach 1

[0015] Specific implementation mode one: as figure 1 As shown, it is composed of a rotating electrode 1, a sealing cover 2, a mixed plasma gas source 3, a radio frequency power source 4, and a gantry processing machine tool 5;

[0016] The rotating electrode 1 is set in the sealing cover 2, the lower end of the sealing cover 2 has an opening 2-1, the inner cavity of the sealing cover 2 is connected with the mixed plasma gas source 3 through the gas pipe 2-2, and the rotating electrode 1 is connected to the radio frequency power supply 4 The output end of the output end is connected as the anode of the atmospheric plasma discharge; the upper end of the sealing cover 2 is insulated and connected to the vertical movement work platform 5-2 of the gantry processing machine tool 5, and the optical part 6 to be processed is clamped at the level of the gantry processing machine tool 5 On the moving working platform 5-1; the working platform 5-1 of the gantry processing machine tool 5 ...

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Abstract

The invention relates to an atmosphere plasma processing device suitable for an aspheric optical element with large caliber, and belongs to the field of optical processing. The atmosphere plasma processing device aims to solve the problem that the conventional mechanical polishing technology is low in processing efficiency and cannot meet the large-batch requirements on optical elements with large caliber in the optical field. A rotary electrode of the atmosphere plasma processing device is arranged in a sealing hood and is connected with the output end of a radio frequency power supply to be used as an anode for atmosphere plasma discharge. The upper end of the sealing hood is connected to a work shaft in an insulating manner, and an optical element to be processed is clamped on a work platform. The work platform is grounded as the cathode for atmosphere plasma discharge. A discharge gap is formed between the rotary electrode and the surface to be processed of the optical element to be processed. The atmosphere plasma processing device can be used for carrying out non-contacted atmosphere plasma processing on the aspheric optical surface with large and high in processing speed, and the edge effect is avoided.

Description

technical field [0001] The invention belongs to the field of optical processing. Background technique [0002] CCOS (Computer Controlled Optical Surfacing) is an optical processing technology developed in the 1970s. With the development of computer technology, CCOS technology has been further improved, which has greatly promoted the development of optical parts manufacturing technology, especially in the polishing process of large-diameter and high-precision aspheric surfaces, which reduces the requirements for operator experience and technology, and improves repeatability. . [0003] Aspherical optical parts have the advantages of correcting aberrations to obtain higher imaging quality, improving the accuracy and stability of the optical system, and simplifying the system structure. They play an important role in laser fusion devices, high-energy lasers, infrared thermal imaging, and space detection optical systems. application and great demand. With the development of m...

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Application Information

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IPC IPC(8): H01J37/32
Inventor 王波金会良姚英学李娜车琳辛强金江李铎
Owner HARBIN INST OF TECH
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