Optical detector based on two-dimensional stratiform atomic crystal materials

A two-dimensional layered, crystalline material technology, applied in semiconductor devices, electrical components, circuits, etc., can solve the problems of difficult to achieve ultrafast broadband absorption photodetectors, difficult to extract photogenerated carriers, and low photoresponsivity of devices , to achieve the effect of improving directional movement and extraction, improving device responsivity, and high device success rate

Inactive Publication Date: 2013-07-24
深圳激子科技有限公司
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Problems solved by technology

The spectral range and detection bandwidth of conventional photodetectors based on group IV and III-V semiconductors (such as silicon and gallium arsenide) are limited by their energy bands and carrier transit times, making it difficult to achieve ultrafast broadband absorption The optical detector is not suitable for some applications that have stricter requirements on device performance, such as the field of ultra-fast broadband data transmission
On the other hand, as the requirements for device integration increase, the device size needs to be continuously reduced,

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  • Optical detector based on two-dimensional stratiform atomic crystal materials
  • Optical detector based on two-dimensional stratiform atomic crystal materials
  • Optical detector based on two-dimensional stratiform atomic crystal materials

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Embodiment Construction

[0029] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0030] see figure 1 As shown, a photodetector based on a two-dimensional layered atomic crystal material includes a silicon substrate 1 covered by silicon dioxide, and the silicon substrate 1 covered by silicon dioxide is sequentially superimposed and covered with a first graphene conductive layer 2. A two-dimensional layered atomic crystal semiconductor material layer 3 and a second graphene conductive layer 4, the first graphene conductive layer 2 and the second graphene conductive layer 4 are respectively connected with the two-dimensional layered atomic crystal The semiconductor material layer 3 forms a heterojunction structure; one end outside the overlapping area of ​​the first graphene conductive layer 2 and the two-dimensional layered atomic crystal semiconductor material layer 3 and the second graphene conductive layer 4 A ...

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Abstract

The invention discloses an optical detector based on two-dimensional stratiform atomic crystal materials. The optical detector comprises a silicon substrate coated with silica, a first graphene conducting layer, a two-dimensional stratiform atomic crystal semiconductor material layer and a second graphene conducting layer are sequentially coated on the silicon substrate coated with the silica in a superposition mode, and the first graphene conducting layer and the second graphene conducting layer respectively form heterogeneous structures with the two-dimensional stratiform atomic crystal semiconductor material layer. One end of the first graphene conducting layer and one end of the second graphene conducting layer are provided with a first electrode layer and a second electrode layer respectively, and the first electrode layer and the second electrode layer have no any overlapping, and the first electrode layer and the second electrode layer are arranged outside an overlapping area of the first graphene conducting layer, the second graphene conducting layer and the two-dimensional stratiform atomic crystal semiconductor material layer at the same time. A passivation layer is respectively arranged above each layer. The optical detector based on the two-dimensional stratiform atomic crystal materials utilizes the two-dimensional stratiform atomic crystal materials, has the operating characteristics that detection spectrum range is wide, response speed is fast and cut-off frequency is high, and has the characteristics that spectral responsivity of a device is high and extraction of a photon-generated carrier is simple.

Description

technical field [0001] The invention belongs to the field of photodetectors, and in particular relates to a photodetector based on a two-dimensional layered atomic crystal material. Background technique [0002] For photodetectors, the detection bandwidth and response speed of photodetectors are important parameters to measure their performance. The spectral range and detection bandwidth of conventional photodetectors based on group IV and III-V semiconductors (such as silicon and gallium arsenide) are limited by their energy bands and carrier transit times, making it difficult to achieve ultrafast broadband absorption The photodetector is not suitable for some applications that have stricter requirements on device performance, such as the field of ultra-fast broadband data transmission. On the other hand, with the improvement of device integration requirements, the device size needs to be continuously reduced, and the traditional device size based on Group IV and III-V sem...

Claims

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Application Information

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IPC IPC(8): H01L31/0352H01L31/0224
Inventor 鲍桥梁李绍娟乔虹甘胜沐浩然徐庆阳
Owner 深圳激子科技有限公司
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