Preparation method of contact-type optical fiber micro probe based on optical fiber tapering technology

Abstract

The invention discloses a preparation method of a contact-type optical fiber micro probe based on an optical fiber tapering technology. Through the optical fiber tapering technology, the diameter of a single mode fiber is attenuated to be in a range of less than 40 micrometers. Then, the single mode fiber after being attenuated is accurately put into a V-type groove in an optical fiber welding machine, and at the same time, the tapered portion of the optical fiber is placed on a discharging region of the optical fiber welding machine. The tapered portion of the optical fiber is heated and fired through the optical fiber welding machine, and the optical fiber is evenly rotated until the end of a tapering optical fiber is melted to be a high-quality micro probe ball. In the process of firing of the optical fiber, process control parameters of the optical fiber welding machine are reasonably arranged based on a taguchi method, the optical fiber is rotated to overcome the impact caused by gravity, and accordingly the micro probe ball which is small in ball diameter, good in sphericity and small in eccentricity is obtained on the end portion of the tapering optical fiber. The micro probe ball and the tapering optical fiber form the contact-type optical fiber probe.

Description

technical field [0001] The invention relates to the field of preparation methods of optical fiber probes, in particular to a preparation method of contact-type optical fiber micro-probes based on optical fiber taper technology. Background technique [0002] With the development of micromachining technology, MEMS devices, ultra-precision mechanical parts, and high-precision optical components are more and more widely used, and the accurate measurement of their three-dimensional contours is becoming more and more urgent. Because the structure of these devices has the characteristics of small lateral size but large aspect ratio and high processing precision, it is necessary to research and develop micro-nano three-dimensional coordinate measuring machines and related technologies that can precisely measure the three-dimensional contours of these devices, including micro The preparation method and preparation technology of the contact microprobe for probing the ball. [0003] T...

AI Technical Summary

Problems solved by technology

The microprobes prepared by existing processing methods have disadvantages such as large volume, complicated preparation methods, and high cost, which cannot meet the needs of three-dimensional micro-nano measurement technology, and are not conducive to mass production.

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