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Local plasma resonance refraction index sensor and manufacturing method thereof

A refractive index sensor and plasma technology, applied in the sensor field, can solve problems such as the inability to widely use biochemical sensing, and achieve the effects of low cost, improved performance, and simple core structure

Active Publication Date: 2013-07-10
SUN YAT SEN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, the quality factor of traditional LPRI sensors is 1 to 2 orders of magnitude lower than that of propagating surface plasmon resonance RI sensors, which prevents them from being widely used in practical biochemical sensing.

Method used

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  • Local plasma resonance refraction index sensor and manufacturing method thereof
  • Local plasma resonance refraction index sensor and manufacturing method thereof
  • Local plasma resonance refraction index sensor and manufacturing method thereof

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Embodiment Construction

[0035] The preferred embodiments of the present invention are given below in conjunction with the accompanying drawings to describe the technical solution of the present invention in detail.

[0036] like Figure 1-4 As shown, the local plasmon resonance refractive index sensor of the present invention (also called "golden mushroom array refractive index sensor") includes an upper metal cap 5, a photoresist dielectric column 31 and a lower metal hole array 4, and the photoresist dielectric column 31 is located between the upper metal cap 5 and the lower metal hole array 4 . Both the top and the bottom of the photoresist dielectric pillar 31 are slightly larger than the middle.

[0037] Determine the range of the refractive index environment and working wavelength required by the sensor, use the electromagnetic wave numerical simulation method to simulate the resonant wavelength position of the localized plasmonic mode of the metal mushroom array in the refractive index enviro...

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Abstract

The invention discloses a local plasma resonance refraction index sensor and a manufacturing method thereof. The local plasma resonance refraction index sensor comprises upper metal caps, medium columns and a lower metal aperture array, wherein the medium columns can be low-refractive-index dielectric media such as photoresist, and is positioned between the upper metal caps and the lower metal aperture array. According to the invention, through regulating an incidence angle, metal particles, the length of a period and particle lifting height, a figure of merit can reach 100; the local plasma resonance refraction index sensor can be widely applied to actual biochemistry sensing; and the preparation technique provided by the invention is simple, is low in cost, and is suitable for volume production.

Description

technical field [0001] The invention relates to a sensor, in particular to a localized plasma resonance refraction index sensor and a manufacturing method thereof. Background technique [0002] Localized surface plasmons excited by metal nanoparticles or metal nanostructures can localize incident light in a sub-wavelength region. This effect is widely used in refractive index sensing, surface-enhanced Raman scattering, fluorescence enhancement, and nonlinearity. areas of enhancement. Due to the presence of localized fields, metal nanoparticles or metal nanostructures usually have a very sensitive spectral response to small changes in the dielectric constant of the surrounding medium. Based on this principle, when the sensor is in the environment of different analytes (solutions or gases), the changes in the intensity or resonance wavelength of the sensor's extinction spectrum or reflection spectrum can represent the change in the refractive index of the analyte. [0003] F...

Claims

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Application Information

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IPC IPC(8): G01N21/41
CPCG01N21/554
Inventor 金崇君沈杨周建华
Owner SUN YAT SEN UNIV
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