Low-noise micro plane fluxgate sensor based on main and auxiliary coil double incentive

Abstract

The invention discloses a low-noise micro plane fluxgate sensor based on main and auxiliary coil double incentive. The low-noise micro plane fluxgate sensor based on the main and auxiliary coil double incentive comprises a substrate, main incentive coils, auxiliary incentive coils, detecting coils, a magnetic core, electrodes and a polyimide film. Two ends of each of two long shafts of the magnetic core are symmetrically provided with two groups of the main incentive coils in a wound mode, wherein the two long shafts are arranged in parallel. The middle portions of the long shafts are symmetrically provided with three groups of the detecting coils and two groups of the auxiliary incentive coils in a wound mode. In the same long shaft, one group of the auxiliary incentive coils are arranged between each two groups of the detecting coils. The main incentive coils, the auxiliary incentive coils and the detecting coils are all arranged on the surface of the substrate. Two ends of each main incentive coil are connected with the electrodes. The low-noise micro plane fluxgate sensor based on the main and auxiliary coil double incentive solves the problems that a traditional fluxgate sensor is poor in manufacturing stability and repeatability, utilizes the main and auxiliary coil double incentive to improves the incentive efficiency of the micro fluxgate sensor, effectively lowers output signal noise and energy consumption, is capable of being manufactured together with an interface circuit in an integrated mode, and can be widely used in many novel fields.

Description

technical field [0001] The invention relates to a miniaturized fluxgate sensor for measuring a weak magnetic field, in particular to a dual sensor based on main and auxiliary coils manufactured by an integrated micro-manufacturing method based on micro-electro-mechanical systems (Micro-Electro-Mechanical Systems, MEMS) technology. Excited low-noise miniature planar fluxgate sensors. Background technique [0002] As a traditional weak magnetic field detection device, the fluxgate sensor has always had its unique advantages and cannot be replaced by other magnetic field sensors. In recent years, it has continuously discovered its application potential in new fields, such as GPS positioning of small mobile devices, Missile inertial guidance, small satellite azimuth and attitude control, motion detection in virtual reality space, geomagnetic compensation and point noise compensation for high-definition television (HDTV), etc. In recent years, since applications of various field...

AI Technical Summary

Problems solved by technology

Among them, the main excitation coils are symmetrically distributed at both ends of the two long axes parallel to the magnetic core, the detection coils and auxiliary excitation coils are symmetrically distributed in the middle of the long axes, and a group of auxiliary excitation coils is distributed between each two groups of detection coils, which effectively solves the problem of miniature magnetism. Due to the uneven distribution of the internal magnetic field caused by the demagnetization effect of the magnetic core of the fluxgate sensor and the problem of hysteresis, the excitation efficiency is improved, the noise and energy consumption of the miniature fluxgate sensor are reduced, and the signal response speed is improved.

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