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Integrated thin film temperature heat flow compound sensor and preparation method thereof

A composite sensor, thin film temperature technology, applied in thermometers, calorimeters, thermometers using electrical/magnetic components directly sensitive to heat, etc., can solve problems such as simultaneous measurement, and achieve the effect of improving processing workers

Inactive Publication Date: 2013-02-13
48TH RES INST OF CHINA ELECTRONICS TECH GROUP CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the heat flow is measured by a heat flow sensor, and the temperature is measured by a temperature sensor. There is no sensor that can simultaneously measure the temperature and heat flow of the aircraft shell material

Method used

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  • Integrated thin film temperature heat flow compound sensor and preparation method thereof
  • Integrated thin film temperature heat flow compound sensor and preparation method thereof

Examples

Experimental program
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Embodiment 1

[0035] see figure 1 , the integrated thin film temperature and heat flow composite sensor 1 includes a substrate 2, a transition layer 3 disposed on the substrate 2, and a thin film thermocouple array disposed on the transition layer 3; the thin film thermocouple array consists of an independent thin film The thermocouple 10 is composed of two or more thin-film thermocouples 10 connected in series through an external junction 11. The thin-film thermocouple 10 includes an A electrode 4 and a B electrode 5; the junction of the A electrode 4 and the B electrode 5 is provided with a thick thermal barrier layer 6; a thin thermal barrier layer 7 is provided on the external junction 11 in the thin film thermocouple array and on the free end electrode of the independent thin film thermocouple 10; The pads 12 are connected to the respective corresponding A compensation wires 13, and the two external ends of the two or more series-connected thin film thermocouples 10 are respectively co...

Embodiment 2

[0039] see figure 2 , the preparation method of the integrated film temperature heat flow composite sensor comprises the following steps:

[0040] (1) For Al with a diameter of 50mm to 150mm and a thickness of 0.5mm to 1mm 2 o 3 The substrate is cleaned to remove oil and impurities on the polished surface of the substrate;

[0041] (2) Set the substrate and the stainless steel mask of the R-type PtRh13-Pt thermocouple PtRh13 electrode together, and clamp it with a stainless steel fixture and put it on the planet carrier of the ion beam sputtering coating machine;

[0042] (3) Deposit Ta with a thickness of 0.05 μm to 0.1 μm by ion beam sputtering 2 o 5 Transition film and PtRh13 thermocouple thin film of 0.1 μm ~ 0.2 μm, remove the stainless steel mask;

[0043] (4) Set the substrate and the stainless steel mask of the R-type PtRh13-Pt thermocouple Pt electrode together, and clamp it with a stainless steel fixture and put it on the planet carrier of the ion beam sputteri...

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Abstract

The invention discloses an integrated thin film temperature and heat flow compound sensor and a preparation method thereof. The sensor is a heat and heat flow measurement integrated thin film sensor. The integrated thin film temperature and heat flow compound sensor disclosed by the invention uses a micro-mechanical machining technology to manufacture a group of thin film thermoelectric couples on the surface of a substrate, and is used for temperature measurement. Meanwhile, a high-temperature-resistant film thin thermoelectric couple array (a thermoelectric pile) is prepared on the surface of the substrate, and a thick thermal barrier layer and a thin thermal barrier layer are arranged on the film thin thermoelectric couple array; and a heat flow can be measured by sensing temperature difference of the thick thermal barrier layer and the thin thermal barrier layer and combining height difference of the thick thermal barrier layer and the thin thermal barrier layer. The integrated thin film temperature and heat flow compound sensor disclosed by the invention has the beneficial effects that the integrated thin film temperature and heat flow compound sensor can simultaneously measure temperature variation and the heat flow of materials of a middle layer and an outer layer in a flying process of a high-speed aircraft, and provide data reference for thermal protection design. Furthermore, the thin film temperature and heat flow sensor with the adoption of the invention has the advantages of simple preparation technique and reliable structure.

Description

technical field [0001] The invention belongs to the technical field of thin-film special sensors, and in particular relates to a thin-film sensor based on micromachining technology and a preparation method thereof. More specifically, the present invention relates to an integrated thin-film temperature-heat-flow composite sensor and its preparation method. The measurement of the temperature and heat flow of the thermal insulation layer is realized by a thin-film thermocouple. The manufacturing process of this thin-film temperature-heat-flow composite sensor is simple and has high measurement accuracy. Background technique [0002] Aircraft or missile models are tested in high-speed wind tunnels. It is necessary to test and analyze the heating conditions of each point on the aircraft under different Mach numbers and different angles of attack, and accurately calculate the mechanical properties of materials under heating conditions, so that Select suitable materials and take h...

Claims

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Application Information

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IPC IPC(8): G01K7/02G01K17/00
Inventor 谢贵久何峰颜志红景涛张建国董克冰
Owner 48TH RES INST OF CHINA ELECTRONICS TECH GROUP CORP
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