Polishing device and polishing method of aspheric optical element

Abstract

The invention discloses a polishing device and a polishing method of an aspheric optical element, and relates to a polishing device of machining. The polishing device is provided with a base, a work bench rotating drive motor, a work bench reversing drive motor, a work bench rotating shaft, a tri-axial linear motor, a tri-axial lead rail, a work bench reversing shaft, a work bench base, a work bench, an upright post, a beam, a Z-axis base, an air bag tool and a control system. The polishing method comprises the following steps: finishing the polishing of a point on the aspheric optical element and other points on a girdle band by the air bag tool by matching with rotation of the work bench in a two-axis linkage manner; stopping rotating the work bench, controlling the Z-axis linear motor and the work bench reversing drive motor, thus rotating the normal directions of upper and lower polishing points of the element to a vertical direction, calculating the length of the air bag tool needing to be fed on an X-axis direction, and calculating through an X-axis linear motor, and controlling the Z-axis linear motor to downwards drive the air bag tool to match with rotation of the work bench so as to polish the upper and lower polishing points of the element and other points on the girdle band in the two-axis linkage manner.

Description

technical field [0001] The invention relates to a machining polishing device, in particular to a polishing device and a polishing method for an aspheric optical element. Background technique [0002] Aspherical optical elements have the advantages of correcting aberrations, simplifying the system, and improving the precision of the optical system. Laser nuclear fusion devices, high-energy lasers, infrared thermal imaging, and optical systems for satellites all have great demands on high-precision aspheric components. However, since the final molding of large-aperture aspheric optical elements needs to go through several cold working processes such as grinding, grinding and polishing, each process will have different effects on the surface quality of optical elements. Therefore, obtaining high-precision aspheric optical elements has become a difficult problem for scholars at home and abroad. As the last process of cold processing of optical components, precision polishing h...

AI Technical Summary

Problems solved by technology

The existing mainstream polishing method CNC polishing method has significant disadvantages, that is, the polishing tool cannot match the workpiece well, which is also the reason why it is difficult to process aspheric optical elements to obtain high precision

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