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Interference detection device based on light-splitting synchronous phase shifting and detection method

A technology of interference detection and synchronous phase shifting, applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of complex operation and low measurement accuracy, and achieve convenient and flexible operation, simple mapping relationship, and suitable for real-time dynamic measurement Effect

Inactive Publication Date: 2013-02-06
HARBIN ENG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The purpose of the present invention is to solve the problems of complicated and difficult operation and low measurement accuracy of the existing optical phase shifting interference detection method, and provide an interference detection device and detection method based on splitting synchronous phase shifting

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  • Interference detection device based on light-splitting synchronous phase shifting and detection method
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  • Interference detection device based on light-splitting synchronous phase shifting and detection method

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specific Embodiment approach 1

[0032] Specific implementation mode one: the following combination Figure 1 to Figure 4 Describe this embodiment mode, the interferometric detection device based on light splitting synchronous phase shifting described in this embodiment mode, it comprises light source 1, it also comprises polarizer 2, collimation beam expander system 3, first polarizing beam splitting prism 4, object to be measured 5 , the first reflector 6, the second reflector 7, the second polarization beam splitter prism 8, λ / 4 wave plate 9, rectangular window 10, the first Fourier lens 11, one-dimensional periodic grating 12, the second Fourier Lens 13, depolarization beamsplitter prism 14, four-quadrant polarizer group 15, image sensor 16 and computer 17, wherein λ is the light wavelength of the light beam emitted by light source 1,

[0033] The light beam emitted by the light source 1 enters the light receiving surface of the collimated beam expander system 3 through the polarizer 2, and the outgoing b...

specific Embodiment approach 2

[0042] Specific implementation mode two: the following combination figure 2 Describe this embodiment mode, this embodiment mode will be further described to Embodiment 1, the depolarization dichroic prism 14 is placed according to the mode that its dichroic surface is parallel to the plane formed by x-axis and z-axis, and the incident light is from 45° or -45° to its dichroic plane. ° Angle of incidence.

specific Embodiment approach 3

[0043] Embodiment 3: This embodiment further describes Embodiment 1 or 2. The one-dimensional periodic grating 12 is a binary one-dimensional periodic grating or a sine one-dimensional periodic grating or a cosine one-dimensional periodic grating.

[0044] In this embodiment, the one-dimensional periodic grating 12 adopts a Ronchi grating with a period d=50 μm.

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Abstract

The invention discloses an interference detection device based on light-splitting synchronous phase shifting and a detection method. The interference detection device belongs to the field of optical interference detection. The invention aims to solve problems of difficulty and complexity in operation and low measurement precision of the conventional optical phase shifting interference detection method. The invention has the scheme that a light beam emitted from a light source is carried out collimation light expansion by a polarizing film and a collimation light expansion system to form a linearly polarized light; the linearly polarized light is divided into an object light beam and a reference light beam after passing through a first polarization light splitting prism; the object light beam and the reference light beam gathered on a second polarization light splitting prism pass through a lambda / 4 wave plate, a rectangular window, a first Fourier lens, a one-dimensional period grating, a second Fourier lens, a depolarization light splitting prism and a four-quadrant polarizing film group in sequence; an interference pattern is generated on a plane of an image sensor; the interference pattern obtained by collection is processed by a computer; and phase distribution of an object to be detected is obtained.

Description

technical field [0001] The invention relates to an interference detection device and a detection method based on light splitting synchronous phase shifting, and belongs to the field of optical interference detection. Background technique [0002] Optical phase-shifting interferometry is a non-contact, high-precision full-field measurement method, which is widely used in the fields of optical surface, deformation and thickness measurement, but the traditional phase-shifting technology needs to collect multiple phase-shifted Interferograms, not suitable for measuring moving objects or dynamic processes. Synchronous phase shifting can obtain multiple phase shifting interferograms at the same time, overcomes the shortcomings of traditional time phase shifting interferometry technology, and can realize real-time measurement of moving objects or dynamic processes, and has attracted extensive attention from scholars at home and abroad in recent years. [0003] Mexican scholar G. R...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B9/02G01B11/06
Inventor 单明广钟志郝本功窦峥张雅彬刁鸣
Owner HARBIN ENG UNIV
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