Capacitive high polymer humidity sensor with micron gridded porous electrode and manufacturing method thereof
A technology of humidity sensor and porous electrode, applied in the direction of material capacitance, etc., can solve the problem of poor reliability of capacitive polymer humidity sensor, etc.
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specific Embodiment approach 1
[0018] Specific embodiment one: the capacitive polymer humidity sensor with the micron grid shape porous electrode described in the present embodiment, it comprises substrate 1 and humidity-sensitive capacitance film, and humidity-sensitive capacitance film comprises lower electrode 4, dielectric layer 5 and The upper electrode 6; it is characterized in that, the upper electrode 6 is a micro-grid porous electrode, and the pores are through holes arranged in an array, and the lower electrode 4 includes a transitional metal thin layer and a gold film.
specific Embodiment approach 2
[0019] Specific implementation mode two: combination figure 1 This implementation mode is described. This implementation mode is further limited to the capacitive polymer humidity sensor with micron grid-like porous electrodes described in the first specific implementation mode, and it also includes an insulating layer.
[0020] In this embodiment, the insulating layer includes a silicon dioxide layer 2 and a silicon nitride layer 3 .
specific Embodiment approach 3
[0021] Specific embodiment three: this embodiment further defines the capacitive polymer humidity sensor with micron mesh porous electrodes described in specific embodiment one, and the transition metal thin layer is a chromium thin layer or a titanium thin layer .
[0022] The function of the chromium thin layer or titanium thin layer is to increase the adhesion strength between the bottom electrode 4 metal and the substrate 1 .
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