Quantitative measurement method and device for phase distribution of phase object and its application

Abstract

The invention discloses a phase object phase distribution quantitative measurement method and a phase object phase distribution quantitative measurement device as well as application of the method and the device. According to the method, the parallel light is projected on a phase object, and a bright field image of the phase object is obtained through an imaging lens; in the direction of light beams, a filter is placed on the frequency spectrum surface behind the imaging lens for absorbing the zero-level frequency spectrum of the object, and a dark field image of the phase object is obtained; and according to information carried by the two images and the theoretical expression of the image light intensity, the bright field image and the dark field image are analyzed by the image processing technology, the phase value of each point of the phase object is obtained, and the phase distribution or image of the phase object is reconstructed. The device for realizing the method is characterized in that a light source, a beam expanding lens, a pinhole filter, a collimating lens, a device for placing the phase object, an imaging lens, the filter used for absorbing the zero-level frequency spectrum of the phase object and an area array photoelectric detector are sequentially arranged in the advancing direction of light beams. The method, the device and the application have the advantages that the quantitative measurement of the phase object is realized, the phase measuring range is 0 to pi, the device is simple, and the cost is low.

Description

technical field [0001] The invention belongs to the technical field of optical precision measurement and image display, and in particular relates to a quantitative measurement method and device for phase distribution of a phase object and an application thereof. Background technique [0002] There are many methods for observing and displaying pure phase objects, mainly including phase contrast method, dark field method, schlieren method, knife-edge method, etc. These methods are widely used in the fields of optical information processing, biomedicine, material testing and scientific research. , but these methods are mostly used for qualitative observation, and it is difficult to realize the quantitative phase distribution measurement of pure phase objects. At present, the quantitative measurement methods of phase objects mainly include dual point source interference scanning imaging method, differential interference phase contrast method, phase shift interferometry, etc. The...

AI Technical Summary

Problems solved by technology

[0002] There are many methods for observing and displaying pure phase objects, mainly including phase contrast method, dark field method, schlieren method, knife-edge method, etc. These methods are widely used in the fields of optical information processing, biomedicine, material testing and scientific research. , but these methods are mostly used for qualitative observation, and it is difficult to realize the quantitative phase distribution measurement of pure phase objects

At present, the quantitative measurement methods of phase objects mainly include dual point source interference scanning imaging method, differential interference phase contrast method, phase shift interferometry, etc. These methods have their own advantages and disadvantages, some cannot be measured in real time, some have more optical components, and the optical path Adjustment is more complicated

Although the dual-point source interferometric scanning imaging method can realize the measurement and reconstruction imaging of the phase distribution of phase objects, the imaging time is long and cannot be used for real-time imaging or observation.

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