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Method for preparing nano-gap metal focusing lens

A technology of metal focusing lens and nano-slit, which is used in lens, metal material coating process, manufacturing of microstructure devices, etc.

Active Publication Date: 2013-01-09
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

It is very difficult to process metal slits with high aspect ratio (>10:1) by existing nanofabrication technology

Method used

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  • Method for preparing nano-gap metal focusing lens
  • Method for preparing nano-gap metal focusing lens
  • Method for preparing nano-gap metal focusing lens

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Embodiment Construction

[0037] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments, but the scope of protection of the present invention is not limited to the following examples, but should include all content in the claims.

[0038] The concrete steps of the embodiment of the present invention are as follows:

[0039] Step (1), select a laser light source with an incident light wavelength λ of 532 nanometers, and select a transparent substrate material, silicon dioxide;

[0040] Step (2), evaporating a metal aluminum film with a thickness d of 400 nanometers on the surface of the substrate, and the incident light is incident perpendicular to the upper surface of the metal film;

[0041] Step (3), take the center that vertically passes through the metal film as the central axis, assuming that the intersection of the central axis and the upper surface of the metal film is the origin of the coordinates, and a certain direction t...

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Abstract

The invention provides a method for preparing a nano-gap metal focusing lens, which comprises the following steps of: firstly, determining the incident wavelength, selecting an appropriate light-passing base material, evaporating a layer of metal film on a base, and enabling incident light to be vertical to the surface of the metal film; machining slit or circular gap arrays which are equal in width in the metal film by using a nano machining technology; and focusing light at a preset focus position, calculating phase delay distribution of slits or circular gaps arranged at different positions by a light wave when the light is focused at the focus position, and through focusing ion beams, guiding a medium with a special deposition thickness to meet the phase delay requirements of slits or circular gaps arranged at different positions by the light wave, so that the metal focusing lens realizes the focusing of incident light at the preset focus position. According to the invention, the deposition thickness of mediums in slits or circular gaps of the metal focusing lens is changed according to a preset focus position so as to realize near-field or far-field light focusing, the method can be applied to the integration of light path systems conveniently, and therefore, the method has a broad application prospect.

Description

technical field [0001] The present invention relates to the technical field of focusing devices for processing slits or annular slits on metal films, and in particular to a method for preparing a nano-slit metal focusing lens. focus lens. Background technique [0002] In recent years, the design of metallic nanophotonic devices based on surface plasmon phase modulation has attracted great attention. According to the antisymmetric dispersion characteristic of surface plasmon in metal slit, the propagation constant of surface plasmon in metal slit is determined by the slit width and the dielectric constant of slit material. The phase modulation of the existing metal structure nanophotonic device design is by adjusting the width of the slit on the metal film, so as to realize the phase modulation at the sub-wavelength scale. However, the ability to tune the phase by changing the metal gap width is very limited. In order to achieve a phase change in the periodic range (0 to 2...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81C1/00G02B3/00
Inventor 罗先刚赵泽宇王长涛王彦钦黄成陶兴杨欢刘利芹杨磊磊蒲明薄
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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