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Side pump source of vertical-cavity surface-emitting laser and manufacturing method of side pump source

A vertical cavity surface emission and side pumping technology, applied in lasers, laser parts, semiconductor lasers, etc., can solve the problem that side emitting semiconductor lasers are not suitable for side pumping sources, etc., to improve the input current on-line, beam The effect of quality improvement, increasing the number of light-emitting units

Inactive Publication Date: 2013-01-02
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0005] In order to solve the disadvantage that edge-emitting semiconductor lasers are not suitable for side pumping sources, the present invention proposes a side pumping source for vertical cavity surface emitting lasers and a manufacturing method thereof

Method used

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  • Side pump source of vertical-cavity surface-emitting laser and manufacturing method of side pump source
  • Side pump source of vertical-cavity surface-emitting laser and manufacturing method of side pump source
  • Side pump source of vertical-cavity surface-emitting laser and manufacturing method of side pump source

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Embodiment Construction

[0038] The inventive idea of ​​the present invention is: to propose a one-dimensional serial connection structure, which can increase the light output unit without significantly increasing the driving current, and can connect gold wires on the three sides of the vertical cavity surface emitting laser to increase the upper limit of the current, and High integration, easy to achieve uniform pumping of the beam, and improve the quality of the output beam.

[0039] The present invention will be described in detail below in conjunction with the accompanying drawings.

[0040] Such as Figure 1-9 As shown, the vertical cavity surface emitting laser side pump source of the present invention includes: a large channel heat sink 1 with a cooling liquid inside, the upper end of the large channel heat sink 1 is provided with a horizontal mounting surface 6, an insulating heat sink 2, And a vertical cavity surface emitting laser array 4; a metal thin film 3 is plated in the insulating hea...

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Abstract

The invention relates to a side pump source of a vertical-cavity surface-emitting laser and a manufacturing method of the side pump source and relates to the technical field of semiconductor optoelectronics. The side pump source of the vertical-cavity surface-emitting laser comprises a large-channel heat sink in which refrigeration liquid is contained, wherein a horizontal installation plane and an insulating heat sink of serially connected structure, metal films at the surface of the heat sink, gold wire leads and a vertical-cavity surface-emitting laser array are arranged at the upper end of the heat sink. With the adoption of the side pump source of the vertical-cavity surface-emitting laser, a light emitting area is increased when a current is not increased, power is increased, an integration degree is high, and a light beam is good in quality.

Description

technical field [0001] The invention relates to the technical field of semiconductor optoelectronics, in particular to a side pumping source of a vertical cavity surface emitting laser and a manufacturing method thereof. Background technique [0002] Semiconductor lasers can be divided into two types: edge emitting and surface emitting. Among them, the edge-emitting semiconductor laser has been developed relatively maturely. However, because its beam is elliptical, the difference in divergence angle between two mutually perpendicular axes is relatively large, and the beam quality is relatively poor. Expensive beam shaping system. [0003] Vertical cavity surface emitting laser (VCSEL) is a new type of laser that emits light vertically. The structure different from the traditional edge-emitting laser brings many advantages: the small divergence angle and the circularly symmetrical far and near field distribution greatly improve the coupling efficiency with the fiber, withou...

Claims

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Application Information

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IPC IPC(8): H01S5/183H01S5/024
Inventor 宁永强张金胜张金龙刘云王立军
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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