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Strong three-friction stepper driven by two piezoelectrics side by side

A dual piezoelectric and piezoelectric technology, which is applied in the field of piezoelectric steppers and three-friction steppers, can solve the problems of poor solidity of the three-friction stepper, and achieve improved resistance to external vibration and sound interference, Increases solidity and enhances rigidity

Inactive Publication Date: 2013-01-02
UNIV OF SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The technical problem to be solved by the present invention is the problem of poor robustness of the existing triple-friction stepper driven by double piezoelectric bodies side by side, thereby providing a solid triple-friction stepper driven by double piezoelectric bodies side by side

Method used

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  • Strong three-friction stepper driven by two piezoelectrics side by side
  • Strong three-friction stepper driven by two piezoelectrics side by side
  • Strong three-friction stepper driven by two piezoelectrics side by side

Examples

Experimental program
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Effect test

Embodiment 1

[0034] Example 1: Basic Rugged Dual Piezo Side-by-Side Triple-Friction Stepper Pushed

[0035] See attached figure 1 , a three-friction stepper driven side by side by a basic solid double piezoelectric body, including two piezoelectric bodies 2a, 2b, a base 1, and a slider 3, and the two piezoelectric bodies 2a, 2b are parallel to the stretching direction Set side by side and fixedly stand on the base 1 to form a double piezoelectric body structure, which is characterized in that it also includes a bridging piece 4, the left and right ends of the bridging piece are respectively fixed to the free ends of the two piezoelectric bodies 2a, 2b, The slide bar 3 that is slidingly matched with the two piezoelectric bodies 2a, 2b in the telescopic direction is set, and the left and right ends of the slide bar 3 and the bridging piece 4 are pressed perpendicular to the telescopic direction of the two piezoelectric bodies. The positive pressure and the normal pressure that presses the s...

Embodiment 2

[0037] Example 2: Three-friction stepper driven side by side by elastic and strong double piezoelectric bodies

[0038] In the above embodiment, the slider 3 is elastically pressed against the base 1 through the elasticity of the slider and / or the elasticity of the base and / or the additional elastic body 5a, and the slider 3 is elastically pressed against the base 1 through the elasticity of the slider and / or two pressure Electric body elasticity and / or additionally set up elastic body 5a and the left and right ends of described bridging piece 4 are elastically pressed, so as to realize that the left and right sides of slide bar 3 and described bridging piece 4 are set on the direction perpendicular to the expansion and contraction of the two piezoelectric bodies. The positive pressure of the end phase pressure and the normal pressure of the sliding rod 3 and the base 1, and make the maximum static friction force of the three positive pressures on the sliding rod 3, any one of ...

Embodiment 3

[0039] Example 3: Triple-friction stepper driven side-by-side by a solid double piezoelectric body with a double-slit tubular double piezoelectric body structure

[0040] In the above embodiment, the two piezoelectric bodies 2a, 2b are in the shape of a half-pipe cut along the central axis of the tubular body. They are enclosed and fixed on the annular base 1 to form a double-slit tubular double piezoelectric body. body structure.

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Abstract

The invention provides a strong three-friction stepper driven by two piezoelectrics side by side. The stepper comprises two piezoelectrics, a base and a slide rod, wherein the two piezoelectrics are arranged in parallel in a stretching direction and fixedly stand on the base side by side to form a double-piezoelectric structure. The stepper also comprises a bridging piece, wherein the left and right ends of the bridging piece are respectively fixed to free ends of the two piezoelectrics; the slide rod is arranged to be in sliding fit with the two piezoelectrics in the stretching direction; positive pressures for pressing the slide rod to the left and right ends of the bridging piece and a positive pressure for pressing the slide rod to the base are arranged in the direction perpendicular to the stretching direction of the two piezoelectrics; and in the maximal static frictions to the slide rod generated by the three positive pressures, any maximal static friction is smaller than the sum of the other two maximal static frictions. The strong three-friction stepper driven by the two piezoelectrics side by side is simple in structure and high in rigidity, friction condition and optimal friction condition are easy to met, and the stepper can be used as coarse approximate motor in extreme conditions and of a high-sensitivity atom resolution scanning probe microscope.

Description

technical field [0001] The invention relates to a piezoelectric stepper, in particular to a three-friction stepper driven by solid double piezoelectric bodies side by side, and belongs to the technical field of piezoelectric positioners. Background technique [0002] The piezoelectric stepper is a piezoelectric positioner that can accumulate the microscopic small piezoelectric displacement generated by each step into a macroscopic large displacement. Powerful localization tools for nano-device processing, atomic / molecular manipulation, and even imaging of subatomic structures. Its current development trend is high rigidity, high thrust, and miniaturization. [0003] We previously proposed a "three-friction stepper driven by double piezoelectric bodies side by side" (invention patent authorization number: ZL200910116492.X), which is a typical representative of advancing in this direction. Its technical feature is: it includes two piezoelectric bodies, a base, and a sliding ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L25/03H01L41/09H10N30/20
CPCH01L41/09H02N2/025
Inventor 陆轻铀王琦
Owner UNIV OF SCI & TECH OF CHINA
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