Preparation method of rare-earth polishing powder containing fluorine and phosphorus
A rare earth polishing powder, rare earth carbonate technology, applied in chemical instruments and methods, other chemical processes, etc., to achieve the effects of high grinding ability, good surface precision, and good polishing performance
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Embodiment 1
[0021] Embodiment 1: a kind of preparation method of the rare earth polishing powder containing fluorine, phosphorus, is characterized in that, comprises the steps:
[0022] (1) Precipitation: add ammonium bicarbonate aqueous solution to 100 liters of rare earth chloride solution until the pH value is 6.4 to 6.8, and the precipitation is complete to obtain rare earth carbonate, which is washed 2 to 3 times with water;
[0023] The mass concentration of rare earth chloride solution is 200 grams per liter, and the relative content of each rare earth component is calculated by oxide mass as: La 2 o 3 34%; CeO 2 56%; 6 o 11 6 %;Nd 2 o 3 4 %.
[0024] (2) Fluorine-phosphorus composite additive treatment: Take 2460 grams of sodium fluoride and 1340 grams of phosphoric acid, add 830 liters of pure water to make a composite additive solution; add the prepared composite additive to the slurry formed by rare earth carbonate precipitation and water The solution is proc...
Embodiment 2
[0031] Example 2, the method is the same as Example 1, except that the soluble carbonate in step (1) is selected from sodium carbonate, and the addition amount of fluorine-phosphorus composite additive in step (2) is: 1870 grams of ammonium fluoride, 920 grams of pyrophosphoric acid, 640 liters of pure water was prepared as a solution.
[0032] Test results: the amount of erosion is 11.71 um, the surface finish is 6 angstroms, and there is no scratch on the surface.
Embodiment 3
[0033] Example 3, the method is the same as in Example 1, except that the soluble carbonate in step (1) is selected from potassium carbonate, and the addition amount of fluorine-phosphorus composite additive in step (2) is: 1250 grams of ammonium bifluoride, 920 grams of polyphosphoric acid, pure 1130 liters of water was made into a solution.
[0034] Test results: the amount of erosion is 12.45 um, the surface finish is 6 angstroms, and there is no scratch on the surface.
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