Combining system of super-resolution confocal optical microscope and scanning probe microscope

Abstract

The invention discloses a combining system of a super-resolution confocal optical microscope and a scanning probe microscope, wherein laser output by a laser a is focused to a microobjective after being filtered by a dichroism light filter a; the laser output by a laser b enters the microobjective after being filtered by a position-phase plate and a dichroism light filter b in sequence; the laser focused by the microobjective is radiated to a sample table so as to obtain a fluorescent signal of a sample to be tested, and the laser is further focused by the microobjective, collected by a collecting lens a, and subsequently enters a photoelectric detector; a photoelectric signal output by the photoelectric detector is input into an optical signal acquirer; the laser collected by a collecting lens b enters a cantilever of an SPM (Scanning Probe Microscopy) probe; the SPM probe is arranged above the sample table; the light reflected by the SPM probe enters an SPM detector after being collected by the collecting lens b; and an electric signal output by the SPM detector is input into an SPM signal acquirer. The SPM imaging and analysis are guided by the super-resolution optical imaging; as resolution of the super-resolution confocal optical microscope is approximate to the resolution of the SPM, target localization with higher precision can be realized.

Description

technical field [0001] The invention relates to a combined system of a super-resolution confocal optical microscope and a scanning probe microscope, which belongs to the field of scanning microscopic imaging. Background technique [0002] In the field of material science, a large number of research results have shown that the size effect, quantum effect, and surface effect of matter at the nanoscale make nanomaterials and nanodevices exhibit excellent performance. Only by studying the physical and chemical processes of surfaces and interfaces in nano-functional devices at the nanometer scale, as well as the changes in the molecular structure and properties of different surfaces and interfaces, and understanding the working mechanism of nano-functional devices, can the scientific goal of artificially designing and preparing nano-devices with specific properties be realized. . [0003] This is especially true in the study of biochemical reactions and biomolecular structures a...

AI Technical Summary

Problems solved by technology

However, due to the limitation of the optical diffraction limit, the spatial resolution of the existing laser confocal microscope can only reach 250nm-300nm, it is difficult to realize nanoscale optical imaging in complex systems, and the guidance and positioning of SPM probes is not accurate enough.

Images